Micromachining of circular ring microstructure by femtosecond laser pulses

In this paper, integration of interference phenomenon into femtosecond laser micromachining was reported as the femtosecond laser pulses were reshaped spatially to perform ablation. The generation of circular interference pattern was demonstrated by overlapping infrared femtosecond laser pulses. The interference pattern was subsequently focused on a copper substrate to ablate microstructures of concentric circular rings. The present technique is expected to open up new applications in the areas of rapid fabrication of micro-Fresnel lenses, hybrid microlenses and lens arrays.     

基于微机械加工技术的双腔型生物传感器

利用微机械加工技术研制了具有三维结构的腔型传感器，双腔型工作电极与Ag/Agcl参比电极集成在同一微芯片上。考察了微腔型电极的电化学特性及其对H2O2含量的测定。并以此为基础电极制备了半乳糖、葡萄糖双腔型生物传感器。结果表明，该传感器可同时测定半乳糖、葡萄糖双组分，线性上限分别为4．5mmol/L和4．0mmol/L。而且在测试双组分过程中，没有观察到明显的交叉干扰现象。     

约束刻蚀剂层技术对金属铝的微结构加工研究

采用约束刻蚀剂层技术, 以亚硝酸钠为先驱物, 通过电化学氧化产生刻蚀剂(硝酸)刻蚀铝, 并以NaOH为捕捉剂, 在电极模板上形成约束刻蚀剂层. 在金属铝表面加工出梯型槽微结构, 加工分辨率约为500 nm. 通过测量表面氢离子浓度, 对捕捉剂的约束效果进行了分析.     

Deep subsurface optical waveguides produced by direct writing with femtosecond laser pulses in fused silica and phosphate glass

In the present work, we have analyzed the use of elliptical beam shaping along with low numerical aperture focusing optics in order to produce circular cross-section waveguides in different materials at large processing depths by direct femtosecond laser writing (100 fs, 800 nm, 1 kHz). A variable slit located before the focusing optics allows to generate a nearly elliptical beam shape and also to reduce the effective numerical aperture of the beam along the shat axis of the ellipse. The focusing optics allows to focus the beam deep inside the sample, which is translated at a constant speed transversely to the writing beam direction. The influence of several experimental parameters (energy per pulse, slit width, processing depth) on the properties of the produced waveguides has been analyzed. The influence of the intrinsic properties of the material (refractive index, composition) has been analyzed by comparing results obtained in fused silica and Er:Yb co-doped phosphate glass. The results obtained show that this approach leads to the successful production of deep subsurface (up to 7 mm) waveguides with circular cross-sections. Preliminary results using chirped pulses in the phosphate glass suggest that temporal pulse shaping can be used as an additional parameter to optimize the guided mode symmetry.     

Femtosecond laser ablation profile near an interface: Analysis based on the correlation with superficial properties of individual materials

Femtosecond laser ablation of materials is turning to be an important tool for micromachining as well as for selective removal of biological tissues. In a great number of applications, laser ablation has to process through interfaces separating media of different properties. The investigation of the ablation behavior within materials and passing through interfaces is the main aim of this study. Especially, the analysis of the discontinuity in the ablation profile close to interfaces between distinct materials can reveal some of the phenomena involved in the formation of an ablated microcavity geometry. We have used a method that correlates the ablation cross sectional area with the local laser intensity. The effective intensity ablation properties were obtained from surface ablation data of distinct materials. The application of this method allows the prediction of the occurrence of a size discontinuity in the ablation geometry at the interface of distinct media, a fact which becomes important when planning applications in different media.     

Micromachining of a thin film by laser ablation using femtosecond laser with masks

A gold thin film was machined by laser ablation using a femtosecond laser with mask patterns in the shape of lines and numbers. The patterns were successfully transferred with proper focusing and laser fluence. The optimal femtosecond laser fluence to keep the line width was about 5.2 mJ/cm² on the mask, and 99 mJ/cm² on the film. The processing resolution was 13 μm, and the narrowest line width was about 4 μm.     

Laser processing for bio-microfluidics applications (part I)

This paper reviews applications of laser-based techniques to the fabrication of microfluidic devices for biochips and addresses some of the challenges associated with the manufacture of these devices. Special emphasis is placed on the use of lasers for the rapid prototyping and production of biochips in particular for applications in which silicon is not the preferred material base. Part I of this review addresses applications and devices using UV lasers for laser ablation and surface treatment of microchannels, in particular in polymers.     

Crack-free micromachining on glass substrates by visible LIBWE using liquid metallic absorbers

Laser induced backside wet etching (LIBWE) is a promising laser direct-write technique for etching transparent materials and for producing high precision and near-optical quality surfaces. In this study, visible LIBWE using gallium and eutectic indium/gallium as absorbers was used for crack-free microfabrication of sodalime and quartz. Eutectic indium/gallium (In/Ga) has a melting temperature lower than metallic gallium does and the etching rate by using In/Ga was found to be similar to that by gallium for visible LIBWE. When using the gallium absorber, the etching threshold of quartz by visible LIBWE was about one-third of that by UV LIBWE. The heat-affected zone of the quartz etching was negligible at the trench rim in the visible LIBWE process. The wettability of the metallic absorbers on the substrates affects aspect ratio and is a new important factor for LIBWE. In addition, etching rate decreased when repetition rate was increased.     

Active Micromachined Integrated Terahertz Circuits

Schottky barrier diodes have been integrated into on-chip rectangular waveguides. Two novel techniques have been developed to fabricate diodes with posts suitable for integration into waveguides. One technique produces diodes with anode diameters of the order of microns with post heights from 90 to 125 microns and the second technique produces sub-micron anodes with post heights around 20 microns. A method has been developed to incorporate these structures into a rectangular waveguide and provide a top contact onto the anode which could be used as an I.F. output in a mixer circuit. Devices have been fabricated and D.C. characterized.     

飞秒激光高精细加工柴油机喷油嘴倒锥孔法

利用飞秒激光加工热效应小、高精细、对材料无选择性等特点,针对柴油发动机高压共轨系统中关键零件——喷油嘴偶件喷油孔的加工需求,设计了一种利用三光楔扫描的飞秒激光加工装置,并进行了喷油嘴倒锥孔加工工艺研究.采用微孔三座标测量机(测量准确度1.2μm)对倒锥孔尺寸准确度进行检测,通过喷油嘴高压液体流量试验台(测量准确度±0.1%)对批量制孔后的油嘴进行了流量测试,结果表明:所设计装置加工的油嘴性能可以满足欧V排放法规的应用要求,对提升汽车制造业水平及柴油车排放标准具有重要意义.