排序方式: 共有5条查询结果,搜索用时 15 毫秒
1
1.
2.
Kwang-Ryul Kim Sung-Hak Cho Myung-Woo Cho Byoungdeog Choi 《Applied Surface Science》2009,255(18):7835-7840
Maskless photolithographic methods have been developed using digital micromirror devices (DMDs) and grating light valves (GLVs), which are spatial light modulators (SLMs), because liquid crystal display (LCD) panel industries spend huge amounts of money for the cost of TFT (thin film resist)-LCD photomasks. The technology has been developed for implementing 2 μm bitmap resolutions, which is a requirement for the lithographic process, though the process time is still slow for mass-production system. A DMD-based maskless exposure uses 405 nm-wavelength semiconductor lasers as an illumination source and optical engines that contain DMDs, micro lens arrays (MLAs), and projection lenses. A GLV-based system consists of UV lasers and optical write engines, which are constructed with the GLV, grating optics, and imaging lenses. Since many companies have been trying to overcome the time limitations, the maskless technology will be realized in the LCD industry in near future. 相似文献
3.
光栅光阀(GLV)是一种衍射MOEMS空间光调制器,利用其对激光束的调制作用,可成功地应用于计算机直接制版(CTP)系统中。提出了简化的光栅光阀光学模型,并根据夫琅和费单缝衍射理论和多光束干涉理论对光栅光阀的光学特性进行了理论分析。介绍了光栅光阀在热敏CTP系统中的应用,分析了光栅光阀光学记录设备的结构和成像原理。得出了基于GLV技术的热敏CTP数字成像过程,为国内印刷企业使用这种热敏成像技术提供了理论依据。 相似文献
4.
5.
作为一种新颖的MEMS器件,光栅光阀(GLV)被应用于高清晰数字电视和光通信的动态增益均衡(DGE)上,使用角度谱方法分析了这种光调制器的衰减机理,并对其仿真,得到了输入光衰减的曲线。在长距离传输过程中,由于多个EDFA级联产生的非线性,提出了对增益进行动态均衡的要求。基于GLV可以集成为一维阵列的特点,提出了基于这种光调制器的动态增益均衡器的结构,并进行了4路输入光信号的功率均衡实验,在实验中,输出的光功率可以衰减10dB以上,纹波可以控制在0.5dB以内。 相似文献
1