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Deposition of Hydrogen-Free Silicon Nitride Thin Films by Microwave ECR plasma Enhanced Magnetron Sputtering at Room Temperature 下载免费PDF全文
Hydrogen-free silicon nitride (SiNx) films were deposited at room temperature by microwave electron cyclotron resonance (MW-ECR) plasma enhanced unbalance magnetron sputtering system. Both Fourier-transform infrared spectroscopy and x-ray photoelectron spectroscopy are used to study the bonding type and the change of bonding structures of the silicon nitride films. The results indicate that the chemical structure and composition of SiNx films deposited by this technique depend strongly on the N2 flow rates, the stoichiometric SiNx film, which has the highest hardness of 22.9 GPa, could be obtained at lower N2 flow rate of 4 sccm. 相似文献
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Effect of Pretreatment of TaN Substrates on Atomic Layer Deposition Growth of Ru Thin Films 下载免费PDF全文
The polycrystalline ruthenium films are grown on TaN substrates by atomic layer deposition (ALD) using bis(cyclopentadienyl) ruthenium [RuCp2] and oxygen as ruthenium precursor and reactant respectively at a deposition temperature of 330℃. The low-energy Ar ion bombardment and Ru pre-deposition are performed to the underlying TaN substrates before ALD process in order to improve the Ru nucleation. X-ray diffraction, x-ray photoelectron spectroscopy, scanning electron microscopy and atomic force microscopy are carried out to characterize the properties of ALD Ru films. The results show that the nucleation density of Ru films with Ar^+ bombardment to the underlying TaN substrates is much higher than that of the ones without any pretreatment. The possible reasons are discussed. 相似文献
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YANGHong-jun ZHAOBai-jun FANGXiu-jun DUGuo-tong LIUDa-li GAOChun-xiao LIUXi-zhe 《高等学校化学研究》2005,21(2):137-140
Piezoelectric ZnO layers with high resistivity for surface acoustic wave applications were prepared on polycrystalline diamond/Si substrates with(Ill) orientation via metal-organic chemical vapour deposition.The characteristics of the films were optimized through different growth methods. The comparative study of the X-ray diffraction spectra and scanning electron microscopic images showed that the final-prepared ZnO films were dominantly c-axis oriented. Zn and O elements in the final prepared ZnO films were investigated through X-ray photoelectron spectroscopy. According to the statistical results, the n(Zn)/n(O) ratio is near 1. The Raman scattering was also performed in back scattering configuration. E2 mode was observed for the final films, which indicated that the better quality ZnO films had been obtained. The resistivity of the films was also enhanced via the modification of the growth methods. 相似文献
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ZHOU Yan GAO Bingyi DENG Zhongchao JIAO Yiming LIU Xiang YI Jiang LI Yonggao TIAN Chongli TANG Yiwu 《核工业西南物理研究院年报(英文版)》2006,(1):39-40
The study progress of NNSF in 2006 has been presented in this paper. The aim and plan of this item have been described briefly. Three test mirror exposure experiments have been done in this year. The main components of the deposited materials on the first mirror are carbon and iron analyzed by AES. The first mirror is polluted easier during glow discharge and wall processing than omhic discharge. 相似文献
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Effects of Substrate Temperature and Nitrogen Pressure on Growth of AIN Films by Pulsed Laser Deposition 下载免费PDF全文
Highly oriented aluminium nitride (AIN) films are grown on p-Si (100) substrates by pulsed laser deposition, and their characteristics of structure and composition are studied by x-ray diffraction, Fourier transform infrared spectroscopy and scanning electron microscopy. The results show that the deposited films exhibit good crystalline properties with a sharp x-ray diffraction peak at 2θ= 33.15 ° corresponding to AIN h (100) crystalline orientation. The influences of substrate temperature and ambient nitrogen (N2) pressure on the crystallinity of A1N films are remarkable. At room temperature, when the ambient N2 pressure arises from 5 × 10^-6 Pa to 5 Pa, the crystallinity of the film becomes better. When the substrate temperature is 600℃, the film has the best crystallinity at 0.05 Pa. Furthermore, the effects of substrate temperature and ambient N2 pressure on the combination of A1-N bonds and surface morphology of AIN films are also studied. 相似文献
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ZHOU Yan DENG Zhongchao GAO Bingyi JIAO Yiming YI Jiang TANG Yiwu TIAN Congli 《核工业西南物理研究院年报(英文版)》2005,(1):9-10
First mirrors are the facing components of plasma optical diagnostics system for superconductivity and other fusion devices. Due to high level of neutron and gamma radiation, the lifetime and optical state of first mirror will face an enormous challenge. The degradation of the optical character on the mirror surface mainly comes from the two opposite processes, one is erosion, the other is re-deposition. Which proces plays more important role need testing in present machines. Before 2001 the experimental studies mainly put on material character simulation in a laboratory. Recently, the sample of the first mirror has been investigated in actual fusion device and modification of mirror optical properties was made. But how to protect mirror and make the lifetime longer will be an issue need solving urgently. 相似文献
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Towards an Understanding of the Influence of Sedimentation on Colloidal Aggregation by Peclet Number 下载免费PDF全文
The Peclet number is a useful index to estimate the importance of sedimentation as compared to the Brownian motion. However, how to choose the characteristic length scale for the Peclet number evaluation is rather critical because the diffusion length increases as the square root of the time whereas the drifting length is linearly related to time. Our Brownian dynamics simulation shows that the degree of sedimentation influence on the coagulation decreases when the dispersion volume fraction increases. Therefore using a fixed length, such as the diameter of particle, as the characteristic length scale for Peclet number evaluation is not a good choice when dealing with the influence of sedimentation on coagulation. The simulations demonstrated that environmental factors in the coagulation process, such as dispersion volume fraction and size distribution, should be taken into account for more reasonable evaluation of the sedimentation influence. 相似文献
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The sedimentations of two cylindrical particles in three different initial relative positions are numerically simulated using
the lattice Boltzmann method. The movement characteristics and particle interactions during their sedimentation are presented
and discussed in detail. The results show that, (i) if the two particles are released parallel but separated horizontally,
they push away each other, rotate inwards and separate horizontally as they fall; (ii) if the two particles are released parallel
but separated vertically, the sedimentation behavior can be classified into three stages: trailing, tumbling and separating;
(iii) if the two particles are released perpendicular but separated vertically, the sedimentation behavior can be characterized
as: trailing and rotating, touching and sliding. In order to validate our simulation, experiments were also conducted and
the results agree well with the numerical ones.
The project supported by the National Natural Science Foundation of China for Distinguished Scholars (19925210) 相似文献
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利用Ag离子与Br离子之间的化学沉积作用在孔隙中充满明胶的阳极氧化铝(AAO)模板中制备了AgBr/AAO纳米介孔复合材料.材料选择性曝光后,利用原位显影液对其进行化学显影,在AAO模板中选择性得到Ag纳米线阵列.实验结果表明:Ag纳米线是连续的、致密的,且具有多晶结构,充满了曝光部分的模板孔隙.本文还对影响Ag纳米线选择性生长的因素进行了简单讨论. 相似文献