X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

乳液聚合阶段Ⅱ动力学研究的进展

本文简述了乳浓聚合动力学研究的进展,着重于澳大利亚Sydney大学Gilbert等在乳液聚合阶段Ⅱ动力学方面的研究概况。介绍了不同水溶性单体的小尺寸种子乳液体系的SmithEwart递推方程的求解方法及其解析解形式和乳液聚合动力学数据的处理。同时讨论了该研究的局限性。     

Experimental investigation of the aquatic propulsion caused by localised flexural wave propagation in immersed wedges and plates

This paper describes the results of the experimental verification of the idea of wave-like aquatic propulsion of autonomous and man-inhabited vessels first published about 10 years ago by one of the present authors (V.V.K.). The idea is based on employing the unique type of localised flexural elastic waves propagating along edges of wedge-like structures immersed in water (wedge elastic waves). Such wedge-like structures supporting localised elastic waves can be attached like fish fins to a body of a small ship or a submarine and used for their propulsion. The proposed principle of employing localised flexural waves as a source of aquatic propulsion has been biologically inspired by the specific swimming mode used in nature by stingrays. To verify the idea experimentally, the first working prototype of a small catamaran using the above-mentioned wave-like propulsion via the attached rubber keel has been build and tested in Loughborough University. The tests have been carried out in two phases, in a water tank and then in open water. The test results have shown that the catamaran was propelled very efficiently and could achieve the speed of 36 cm/s, i.e., about one vehicle length per second, thus demonstrating that the idea of wave-like propulsion of small man-inhabited craft is viable. The reported proof of the viability of this idea may open new opportunities for marine craft propulsion, which can have far reaching implications.     

Small random perturbations of finite- and infinite-dimensional dynamical systems: Unpredictability of exit times

We apply previous results on the pathwise exponential loss of memory of the initial condition for stochastic differential equations with small diffusion to the problem of the asymptotic distribution of the first exit times from an attracted domain. We show under general hypotheses that the suitably rescaled exit time converges in the zero-noise limit to an exponential random variable. Then we extend the results to an infinite-dimensional case obtained by adding a small random perturbation to a nonlinear heat equation.     

Electrochemical detector with a 20 nl volume for micro-columns liquid chromatography

Summary A flow-through two electrode wall-jet cell with a platinum measuring electrode and a cell volume of 20 nl has been designed and evaluated. It has been used to detect phenols by reversed phase liquid chromatography using short micro bore columns. The linear dynamic range between the measured current and the concentration is greater than 10³ (1.5×10^–7–5×10^–4 mol/l) and the minimum analyzable amount was found to be 10 pg for pyrocatechol. A negligible broadening in the detector permits the use of micro columns down to 0.5 mm internal diameter, packed with 5 m particles, without any substantial distortion of eluted zones.Presented at the 14th International Symposium on Chromatography London, September, 1982     

Recent progress in two-photon small molecule fluorescent probes for enzymes

This review aims to provide a summary of the progress in TP small molecule fluorescent probes for enzymes in recent years and displays the main fluorescent mechanisms that have been applied to design probes.     

苯、甲苯、一氯代苯对含水卵磷脂液晶结构影响的SAXS研究

苯及其衍生物甲苯,一氯代苯都是重要的有机试剂和化工原料,也是对人体有害的有机物。为了了解这些有机试剂对处于生物液晶态的生物膜毒害的机理,我们以含水卵磷脂组成的液晶体系作为人工模型用小角X射线散射(SAXS)方法探讨这些有机试剂对它们结构的影响。关于苯或其它非极性有机介质与含水卵磷脂形成液晶体系及其结构模型前人有一些报导。     

Paracrystalline order in polymers

Summary A brief review of one and three dimensional models of paracrystalline superstructures in polymers, as used for analysing the small angle scattering, is given.

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Zusammenfassung Es wird ein knapper überblick über die bei der Analyse der Kleinwinkelstreuung von Polymeren verwendeten einund dreidimensionalen Modelle der Überstruktur gegeben.

     

Practical capillary gas chromatography—a systematic approach

Capillary gc is now rapidly expanding. Naturally, initiation is most often attempted on the basis of the experience acquired with packed columns. However, such an extrapolation is successful only if a number of essential peculiarities of capillary gc are considered. Based on practical examples this paper discusses six essential details: 1) design and maintenance of the gas flow paths, 2) the greatly increased importance of sampling technique, which should not be confined just to stream splitting, 3) the problems in quantitative analysis arising from small sample size, 4) specific sources of trouble related to small amounts of liquid phase, 5) specific arguments for the choice of the carrier gas, clearly pointing to hydrogen as the ideal carrier and, 6) the different way to approach column production. Figures for all selected examples are given.     

Strukturuntersuchungen an naßersponnenen Polyacrylnitrilfasern nach der Gefriertrocknung

Zusammenfassung An unterschiedlich verstreckten und hydrothermisch nachbehandelten, danach gefriergetrockneten Polyacrylnitril-Gelfasern (PAN) wurden Messungen der Röntgenkleinwinkelstreuung (RKWS), Röntgenweitwinkelstreuung (RWWS) und Tieftemperatur-Gassorption (TTGA) durchgeführt. Die RKWS-Messungen zeigen, daß sowohl in den isotropen als auch in den orientierten Proben eine exponentialstatistische Verteilung der Form und Größe der Inhomogenitäten (Hohlräume, Cluster) vorliegt, welche durch die Kohärenzlängel _c bestimmt wird. Eine erhöhte Röntgenabsorption wurde bei den verstreckten Proben festgestellt. Die Analyse der aus der Kohärenzlänge und den Volumsanteilen der Phasen berechneten charakteristischen RK WS-Parameter (z.B. innere Oberfläche, Durchschußlänge) ergibt, daß jede Behandlung der Gelfasern eine Zu- oder Abnahme der etwa gleich großen Hohlräume verursacht (nucleotic change). Das relative Ausmaß dieser Veränderungen wird besprochen.Der Vergleich mit den Ergebnissen der TTGA an den gleichen Fasern zeigt, daß die Tendenzen bei der spezifischen Oberfläche und dem Porenvolumen (Zu- bzw. Abnahme) bei beiden Methoden annähernd gleich sind. Die Absolutwerte des Hohlraumvolumens unterscheiden sich aber z.T. um den Faktor 40. Dies führt zur Schlußfolgerung, daß mit der RK WS Faserbereiche als Hohlräume erfaßt werden, die bei der TTGA nicht angezeigt werden, weil sie für das Meßgas unzugänglich sind.

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Structural studies on wet-spun freeze-dried polyacrylonitrile fibers

Summary Polyacrylonitrile fibers (PAN) were drawn to different extents, hydrothermally aftertreated, and at last freeze-dried. The products were studied by small angle X-ray scattering (SAXS), wide angle X-ray scattering (WAXS), and low temperature gassorption (LTGS). The SAXS data show that the shape and the size of the inhomogeneities (voids, clusters) have an exponential statistical distribution determined by the correlation lengthl _c, both in the isotropic fibers and in the fiber-oriented ones. It has also been observed that stretching always causes a higher X-ray absorption. An analysis of the characteristic SAXS parameters (e.g., internal surface, mean chord length), which were calculated from the correlation length and the volume fractions of the phases, evidences that in all samples an augmentation or diminution of the number of the voids with nearly the same shape and size takes place (nucleotic change). Its relative number has been pointed out.Comparison with the results of the LTGS investigations at the same fibers shows that the tendencies of the specific surface and porosity (increase, decrease) are approximately the same with both methods. However, the absolute values of void volume differ in some cases by the factor 40. This leads to the conclusion that the SAXS method records domains of these fibers as voids which are not registered by LTGS (voids not accessible for the gas).

Herrn em.o.Univ. Prof. Dr.Josef Schurz zum 70. Geburtstag gewidmet