抛光对光纤连接器回波损耗的影响

分别选用氧化铝和氧化硅材料的抛光砂纸,在施加不同抛光压力、抛光时间,以及抛光助剂等工艺条件下,实验研究了抛光对连接器回波损耗的影响规律。通过实验发现:氧化铝砂纸干式抛光使光纤连接器的回波损耗仅保持在32～38dB之间;氧化硅砂纸干式抛光会造成光纤端面污损,使得连接器的回波损耗降低到20dB以下;氧化铝与氧化硅砂纸湿式抛光均可使光纤连接器的回波损耗提高到45～50dB,但氧化铝砂纸湿式抛光会造成80nm以上的光纤凹陷。因此,制作高回波损耗的光纤连接器应优先选用氧化硅砂纸湿式抛光工艺,抛光时间应控制在20～30s。     

Design of undercuts and dipole stabilizer rods for the CPHS RFQ accelerator

As part of the design and machining of the RFQ accelerator in the Compact Pulsed Hadron Source (CPHS) project at Tsinghua University, the design process of the undercuts and dipole stabilizer rods is presented in this paper. In particular, the relationship between the inter-vane voltage slope and the local frequency of the undercut section is described quantitatively. With the identification of modes existing in the cavity, the specific parameters are optimized by the SUPERFISH and MAFIA codes. In addition, the water-cooling requirement of the dipole stabilizer rods is briefly discussed.     

Mechanical properties of silicon nanobeams with undercut evaluated by combining dynamic resonance test and finite element analysis

Mechanical properties of silicon nanobeams are of prime importance in nanoelectromechanical system applications. A numerical experimental method of determining resonant frequencies and Young's modulus of nanobeams by combining finite element analysis and frequency response tests based on an electrostatic excitation and visual detection by laser Doppler vibrometer is presented in this paper. Silicon nanobeams test structures are fabricated from silicon-on-insulator wafers by using a standard lithography and anisotropic wet etching release process, which inevitably generates the undercut of the nanobeam clamping. In conjunction with three-dimensional finite element numerical simulations incorporating the geometric undercut, dynamic resonance tests reveal that the undercut significantly reduces resonant frequencies of nanobeams due to the fact that it effectively increases the nanobeam length by a correct value Δ L, which is a key parameter that is correlated with deviations in the resonant frequencies predicted from the ideal Euler-Bernoulli beam theory and experimentally measured data. By using a least-square fit expression including Δ L, we finally extract Young's modulus from the measured resonance frequency versus effective length dependency and find that Young's modulus of silicon nanobeam with 200-nm thickness is close to that of bulk silicon. This result supports that the finite size effect due to surface effect does not play a role in mechanical elastic behaviour of silicon nanobeams with the thickness larger than 200 nm.     

一种基于附加重力场的铸件拓扑优化方法

针对铸件结构拓扑优化问题,提出了一种新的铸造脱模约束形式.首先,在变密度拓扑优化的框架下,提出了相对密度描述的优化解的逆结构概念;之后,对该逆结构施加附加重力载荷并固定脱模方向的边界;最后,利用该问题的位移解构造铸造约束.通过对逆结构的最大柔顺性施加单一约束,即可避免优化结构出现不可铸造的特征(包括内部孔洞和侧凹),从...     

Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching＊

We use a simple and controllable method to fabricate GaN-based light-emitting diodes （LEDs） with 22° undercut sidewalls by the successful implementation of the inductively coupled plasma reactive ion etching （ICP-RIE）. Our exper- iment results show that the output powers of the LEDs with 22° undercut sidewalls are 34.8 rnW under a 20-mA current injection, 6.75% higher than 32.6 mW, the output powers of the conventional LEDs under the same current injection.     

Mechanical properties an undercut evaluated resonance test and of silicon nanobeams with by combining the dynamic finite element analysis

Mechanical properties of silicon nanobeams are of prime importance in nanoelectromechanical system applications. A numerical experimental method of determining resonant frequencies and Young＇s modulus of nanobeams by combining finite element analysis and frequency response tests based on an electrostatic excitation and visual detection by using a laser Doppler vibrometer is presented in this paper. Silicon nanobeam test structures are fabricated from silicon-oninsulator wafers by using a standard lithography and anisotropic wet etching release process, which inevitably generates the undercut of the nanobeam clamping. In conjunction with three-dimensional finite element numerical simulations incorporating the geometric undercut, dynamic resonance tests reveal that the undercut significantly reduces resonant frequencies of nanobeams due to the fact that it effectively increases the nanobeam length by a correct value △L, which is a key parameter that is correlated with deviations in the resonant frequencies predicted from the ideal Euler-Bernoulli beam theory and experimentally measured data. By using a least-square fit expression including △L, we finally extract Young＇s modulus from the measured resonance frequency versus effective length dependency and find that Young＇s modulus of a silicon nanobeam with 200-nm thickness is close to that of bulk silicon. This result supports that the finite size effect due to the surface effect does not play a role in the mechanical elastic behaviour of silicon nanobeams with thickness larger than 200 nm.     

Mechanical properties of silicon nanobeams with an undercut evaluated by combining the dynamic resonance test and finite element analysis

Mechanical properties of silicon nanobeams are of prime importance in nanoelectromechanical system applications.A numerical experimental method of determining resonant frequencies and Young’s modulus of nanobeams by combining finite element analysis and frequency response tests based on an electrostatic excitation and visual detection by using a laser Doppler vibrometer is presented in this paper.Silicon nanobeam test structures are fabricated from silicon-oninsulator wafers by using a standard lithography and anisotropic wet etching release process,which inevitably generates the undercut of the nanobeam clamping.In conjunction with three-dimensional finite element numerical simulations incorporating the geometric undercut,dynamic resonance tests reveal that the undercut significantly reduces resonant frequencies of nanobeams due to the fact that it effectively increases the nanobeam length by a correct value △L,which is a key parameter that is correlated with deviations in the resonant frequencies predicted from the ideal Euler-Bernoulli beam theory and experimentally measured data.By using a least-square fit expression including △L,we finally extract Young’s modulus from the measured resonance frequency versus effective length dependency and find that Young’s modulus of a silicon nanobeam with 200-nm thickness is close to that of bulk silicon.This result supports that the finite size effect due to the surface effect does not play a role in the mechanical elastic behaviour of silicon nanobeams with thickness larger than 200 nm.