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21世纪初,超大规模集成电路(ULSI)的特征尺寸将由150nm逐代缩至50nm。文章以100nmULSI器件为主,简要介绍与互连相关的一些材料物理问题,其中包括Cu互连、金属化及低介电常数介质。 相似文献
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Dong‐Cai Zhao Geng‐Jie Xiao Ni Ren Zhan‐Ji Ma Sheng‐Hu Wu 《Surface and interface analysis : SIA》2011,43(11):1392-1396
The composites, such as CFRP and GFRP, have been widely applied in spaceflight, for their low specific gravity, low cost, and additional structural stability. However, the high resistivity of the composites severely inhibits their further applications. Therefore, Cr/Al films with low resistivity and high adhesion were deposited on composites by cathodic arc technique. The films were characterized by pull test, Dektak 8 Stylus Profilometer, SEM, XPS, XRD and Z‐82 standard four probes. Results show that the aluminum film of fcc structure is compact and uniform, with resistivity as low as bulk Al. The adhesion between Cr buffer layer and composite substrate was greatly enhanced because of the formation of the chemical bonds, such as Cr? C, Cr? O and Cr? N, at the Cr/composite interface. Copyright © 2011 John Wiley & Sons, Ltd. 相似文献
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We have studied the band structure and the band gap closure in phase I of solid iodine under high pressure, using the methods based on the quasiparticle theory, i.e. GW approximation. Our calculations show that the band gap in the Cmca structure, which is the structure of the phase I of solid iodine, closes around 20 GPa. This pressure is near the upper boundary of phase I. We discuss the possible metallic transition in the molecular phase of solid iodine and the possible changes of the crystal structure. 相似文献
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Abstract In the melts of Te, Se, S, I2 and Mg3Bi2 the nonmetal-metal transitions were found under pressure. The transitions are accompanied by a decrease of the volume. The transitions seem to terminate at high temperature by “critical regions”. For S and Se the kinetics of the transitions and the pressure influence on the solidification of the melts were investigated. The existence of the transitions of this kind gives an explanation of anomalies of melting curves of some substances. 相似文献
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Abstract In molten iodine two transitions accompanied by a large increase of conductivity (σ) were found under pressure between 3 and 4 GPa. During the first transition a increases by approximately 10′ times, the volume changing very slightly or remaining constant. During the second transition a increases by 2-10 times and then is accompanied by a decrease of volume. 相似文献
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Evolution of electrical conductivity and semiconductor to metal transition of iron oxides at extreme conditions
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Yukai Zhuang 《中国物理 B》2022,31(8):89101-089101
Iron oxides are widely found as ores in Earth's crust and are also important constituents of its interiors. Their polymorphism, composition changes, and electronic structures play essential roles in controlling the structure and geodynamic properties of the solid Earth. While all-natural occurring iron oxides are semiconductors or insulators at ambient pressure, they start to metalize under pressure. Here in this work, we review the electronic conductivity and metallization of iron oxides under high-pressure conditions found in Earth's lower mantle. We summarize that the metallization of iron oxides is generally controlled by the pressure-induced bandgap closure near the Fermi level. After metallization, they possess much higher electrical and thermal conductivity, which will facilitate the thermal convection, support a more stable and thicker D$\prime\prime$ layer, and formulate Earth's magnetic field, all of which will constrain the large-scale dynamos of the mantle and core. 相似文献
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