纳米级精度分光路双频干涉度量系统的设计

为完成快速、精确的外观轮廓度量,设计了一种新型纳米级精度分光路双频干涉度量系统。系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。微探针以轻敲式接近样品至几十纳米时,受原子力作用发生偏转,利用双频干涉模块度量其纵向偏转量,并对样品进行梳状式度量得到外观形貌。根据双频激光的实际光源,对原有双频干涉度量理论进行了改进提高。进行了系统组建和实验验证。结果表明:系统具有纳米级精度,可用于超精样品外观轮廓度量。     

Benefits of X-Ray Spectrum Simulation at low Energies

 There are particular benefits in spectrum simulation for the interpretation of characteristic X-ray peaks below about 2 keV in energy, where peak overlaps, a sloping background and changing detector efficiency make it difficult to measure true peak intensities. Despite these difficulties, we have shown that a useful accuracy of simulation is possible without major revision of the existing theory, allowing the electron microprobe user to compare on-line a measured spectrum with one synthesised from an assumed sample composition. As part of a wider study, we have used a database of X-ray spectra from 150 samples of known composition to confirm the accuracy of simulation over the energy range from 0.28–1.9 keV, finding an RMS error of better than 8%. The database included 181 Kα, Lα and Mα peaks from elements of atomic number 6–77, excited by beam voltages from 5–30 kV. Central to the method is the use of the ratio of (Peak Intensity)/(Total Background Intensity), which allows spectra to be compared from instruments of differing collection efficiency, thereby easing the collection of data over a wide range of conditions. Examples are given to illustrate the use of the simulator in helping to choose the best conditions for analysis, and as an aid in interpreting the spectra so obtained. Both modes of operation are iterative in nature and require a fast and accurate simulator that is easy to use. Further development will be guided by experience in its use.     

Electron microprobe analysis of micro amount powder samples: A case study on high purity coal

For the major, minor and trace element analysis of the inorganic compounds of a Ruhr-Saar coal different preparation techniques are investigated with X-ray fluorescence analysis, electron microprobe and classical wet chemical methods minimizing sample weight at standard preparation times and analytical accuracies. Considering accuracy as well as preparation efforts, determinations by electron microprobe on small sample amounts (<50 mg) proved to be superior to the other methods.Abbreviations AAS atomic absorbtion spectrometry - EMA electron microprobe analysis - IC ion chromatography - ISE ion sensitive electrode - PHOT photometry - WCA wet chemical analysis - XRF X-ray fluorescence analysis - LTA low temperature plasma ashing - HTA high temperature ashing - l.o.i. loss on ignition     

Correction procedure for the electron microprobe analysis of porous materials

A correction method is proposed for the quantitative determination of stoichiometric ratios in porous materials by electron microprobe analysis. Analysis of this kind of material is complicated by an imperfect surface that can only be improved to some extent. The correction is based on a linear dependence (different for each element) of the analyses on a sum of weight concentrations of oxides. With this correction it is possible to use analyses affected by the imperfection of the surface with much better confidence compared to common normalisation. An example is presented for a series of ceramic superconductors Bi_2.1(SrCa)_2.9Cu₂O₈₊.     

The Legacy of Raimond Castaing

 In April 1998 Raimond Castaing left the world of electrons, of ions and others particles, his wife and his family, his numerous students, for the world of stars. Raimond Castaing (Fig. 1) had a very strong personality. No one will forget their first meeting with him and all his students remember how brilliant he was as a teacher. A lot of anecdotes about his famous hot temper are still circulating among his friends and his former students. But in this paper, we would like to evoke Castaing’s memory through his achievements in Instrumental Physics, from the time of his doctoral thesis to later developments with his students, which were all centred on the imaging of the microstructures of materials and their quantitative chemical analysis.     

Topical Problems in Elemental Analysis of Advanced Ceramic Materials

Selected prominent problems in the analysis of advanced ceramic materials are surveyed. The importance of reliability of results is discussed in the field of elemental trace- and microanalysis in view of its interaction with economy, power of detection, local resolution and speciation selectivity. Particular problems in the analysis of major constituents, trace components and microlocal distributions are based on the striking propertics of ceramics; they are exemplified. Analytical assistance must start from the beginning of the production processing, in the preparation of the powdered base materials. Determination of the stoichiometry requires high accuracy and differentiation of chemical species in bulk and surface analysis of ceramic base powders. Element trace determination by direct instrumental methods requires standard reference materials for calibration; these are currently inavailable in a sufficient variety. For optimum reliability and power of detection, element traces must be prepared in isolated form in a small excitation volume for analysis. A review on the state-of-the-art of wet-chemical combined procedures is presented. Decomposition position procedures are emphasized, due to their risk of contributing severe systematic error. Combustion in elementary fluorine is presented for decomposition of refractory materials. The performance of some direct procedures is discussed. Very efficient methods are available for element trace determinations in ceramic materials, offering high detection power. Several approaches for high-resolution local microanalysis in non-conductive ceramic materials are identified as the most promising development in the analysis of sintered compact ceramic products and devices.     

Application of a synchrotron microprobe to the analytical characterization of ion-implanted material

A synchrotron microprobe has been used to characterize ion implantations of nickel and cobalt in silicon (100) or (111) wafers. The synchrotron radiation is collimated by means of a rigid cylindrical glass capillary of 110 mm length, 5 mm outer and 30 μm or 10 μm inner diameter. The beam is pointed at the wafer sample and the emitted radiation of X-rays is detected by an energy dispersive spectrometer. Line scans are recorded step by step over the implantation areas and across their borders. The sharpness of the borders is characterized at a lateral resolution of 13 μm and the edge lengths ranging from 0.6 to 8 mm are determined with an accuracy better than ± 20 μm. The signal intensity and implantation dose of cobalt ranging from 1 × 10¹⁵ to 1 × 10¹⁷ ions cm⁻² show a linear relationship as is to be expected for the micrometre thin implanted layers.     

GaN基异质外延膜中Al组分含量测试方法综述

介绍了目前可用于AlGaN半导体异质外延膜中Al组分含量测定的多种测试技术,包括高分辨X射线衍射技术、光致发光法、紫外-可见光透射光谱法、电子探针法、卢瑟福背散射法等,并对各种测试技术的原理和优缺点进行了概述。     

基于同步辐射的快速扫描X射线微束荧光成像方法

在上海光源硬X射线微聚焦光束线站(BL15U1)上, 基于EPICS软件平台, 集成运动控制, 光强探测, 荧光探测等功能, 实现了"飞行"模式 (on-the-fly) X射线扫描微束荧光成像方法. 用"飞行"扫描X射线荧光成像法获得了标准镍网, 以及微量元素Cu, Zn,K, Fe在样品老鼠脾内的分布图像, 结果显示该方法不但在速度上有了极大的提高, 而且获得的元素分布图像具有高质量. 关键词： 快速扫描X射线微束荧光成像 同步辐射 微量元素分布