偏氟乙烯和四氟乙烯共聚反应中链自由基的反应性

应用高分辨率核磁共振仪研究了一系列不同组成的偏氟乙烯和四氟乙烯共聚物。指出,共振核—CF_2—的化学位移不仅受第一、二邻位基团的影响,也受第三邻位的影响。偏氟乙烯和四氟乙烯以无规共聚进行反应,在共聚反应中的链自由基﹏CF_2·或﹏CH_2·容易增长于CH_2=CF_2的CH_2端,而链自由基﹏CH_2·在偏氟乙烯和四氟乙烯共聚反应中的增长倾向于四氟乙烯。     

Unsaturated bond existing in tetrafluoroethylene-propylene-vinylidene fluoride terpolymer

Infrared and nuclear magnetic resonance (NMR) spectroscopies have been applied for quantitative comparison on unsaturated bonds in tetrafluoroethylene (TFE)-propylene (P)-vinylidene fluoride (VdF) terpolymers. These spectroscopies have led to consistent results while they are based on completely different principles. It is shown that the absolute concentration can be evaluated from NMR measurements. The behavior of unsaturation has been discussed in terms of after-treatment such as wet and dry treatments. The result obtained here can give the important information to improve the performance of fluoroelastomer based on TFE-P-VdF terpolymers.     

Dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials

We have synthesized various main-chain fluorinated polymers and studied base-resin properties, such as transparency at 157 nm, solubility in a standard alkaline developer, and lithographic performance. Main-chain-fluorinated polymers were synthesized by copolymerization of tetrafluoroethylene (TFE) with cyclic monomers, especially newly synthesized norbornene derivatives. We studied the correlation between pK_a(OH) and the solubility of the copolymers of TFE and functional (fluoroalkyl alcohol group) norbornenes. Their solubility depends on the pK_a value of the fluoroalkyl alcohol groups.We studied the impact of the polymerization initiators on base-resin properties. High transparency was obtained by using the fluorocarbon initiator. It was also confirmed that the monocyclic component improves dry-etch resistance and that fluorination at the terminal groups improves alkaline solubility.In addition, we found that the development characteristics of TFE/norbornene copolymers were significantly improved by the stereoselective (endo versus exo) partial protection of the hydroxyl groups in the fluoroalkyl alcohol moiety attached to norbornene unit. The polymer protected only in the exo position of the norbornene unit in the copolymer had a higher R_max and a higher contrast. Positive-working resists based on these fluoropolymers were developed and 55 nm dense lines could be delineated by exposure at 157 nm wavelength with an alternating phase shift mask on a 0.9 NA 157 nm exposure tool.     

Tetrafluoroethylene telomerization using dibromohaloethanes as telogens

Carrier mediated telomerization (CMT) between C₂F₄ and bromochlorofluoroethanes has been evaluated in terms of product distributions arising from CMT and ‘normal’ telomerization. The effect of parameters like type of initiator and telogen, TFE pressure and temperature on the reaction has been studied. The peroxide initiated telomerization between dibromohaloethanes and C₂F₄ offers an easy synthetic route to α,ω-dibromo perfluoroalkanes Br(CF₂)_nBr with n = 2, 4, 6 and 8. The selectivity of the CMT products versus those from “normal” telomerization depends mainly on the choice of telogen and on its ability to act as ‘bromine donor’ in the radical telomerization. These perfluoroalkyl dibromides are useful intermediates for other derivatives, for example, perfluorinated mono- and diolefins, Br(CF₂)_nCHCH₂ and CH₂CH(CF₂)_nCHCH₂.     

Low-temperature fluorination of fluoro-containing polymers: EPR studies of polyvinylidenefluoride and the copolymer of tetrafluoroethylene with ethylene

The direct fluorination of polyvinylidenefluoride (PVDF) and the copolymer of tetrafluoroethylene with ethylene (CTE) was studied at 35-300 K. The dependence of radical formation on temperature and reaction time was obtained by use of electron paramagnetic resonance (EPR) spectroscopy. Primary alkyl radicals formed as a result of the reaction of fluorine abstracting a hydrogen from the polymer were detected at 35 K. These radicals rapidly react with molecular oxygen producing long-lived (∼48 h at 300 K) peroxy radicals. The peroxy radicals when subjected to UV-irradiation (λ < 280 nm) give rise to other radicals that are not stable at T > 77 K. The concentration of the radicals produced during fluorination of PVDF at 77-200 K is one order of magnitude less than that formed from CTE under similar conditions. A mechanism based on the abstraction of the H and the energies of the C-H bonds is given. Density functional theory was used to predict the structures and EPR parameters for a number of fluorinated radicals to explain the observed spectra. The FOO radical was detected at low temperatures.     

Reductive dimerization of dithianylium salts and fluorodesulfuration: a new synthetic approach to tetrafluoroethylene substructures

The reductive dimerization of dithianylium ions, followed by oxidative fluorodesulfuration, opens a convenient access to a variety of 1,2-disubstituted tetrafluoroethylene derivatives. A similar method leads to hexafluorodiacetyl, a potential building block for fluorinated heterocycles.     

Novel ionic liquids—Imidazolium salts with a difluoromethylene fragment directly bonded to the nitrogen atom

Alkylation of N-(1,1,2,2-tetrafluoroethyl)imidazole (1) by alkyl iodides and metathesis resulting in corresponding tetrafluoroborates and bis(trifluoromethanesulfonyl)amides led to the formation of new type stable ambient temperature ionic liquids 3 and 4 with a difluoromethylene fragment directly bonded to the nitrogen atom.     

火焰喷涂ETFE涂层的干摩擦磨损性能研究

采用火焰喷涂技术制备了乙烯-四氟乙烯共聚物（ETFE）涂层。利用红外光谱仪（FTIR）、差示扫描量热仪(DSC) 及摩擦磨损试验机考察了涂层的结构、热性能及摩擦学性能,并采用扫描电子显微镜（SEM）对涂层的磨损表面形貌进行分析。结果表明： ETFE粉末在火焰喷涂过程中没有发生氧化、降解反应;在摩擦载荷为20~120 N及摩擦速度为20~120 r/min的干摩擦条件下,涂层的摩擦系数为0.25~0.34,磨损量为0.006 8~0.157 8 g/(N?m);SEM分析表明涂层的磨损机制主要为塑性变形、疲劳磨损和轻微的黏着磨损。     

Design of very transparent fluoropolymer resists for semiconductor manufacture at 157 nm

Photolithography at 157 nm requires development of new photoresists that are highly transparent at this wavelength. Transparent fluoropolymer platforms have been identified which also possess other materials properties required for chemically amplified imaging and aqueous development. Polymers of tetrafluoroethylene (TFE), a fluoroalcohol-substituted norbornene and an acid-labile acrylate ester show the best combination of properties. A solution, semibatch, free-radical polymerization process was developed allowing synthesis of the terpolymers on a multikilogram scale. Further property enhancements may arise from replacing the norbornene with functionalized tricyclononenes. Formulated resists have been imaged in a 157 nm microstepper.     

VDF/TFE/PMVE三元共聚物的结构与性能研究

控制不同单体的起始组成合成了一系列偏氟乙烯 (VDF) 四氟乙烯 (TFE) 全氟甲基乙烯基醚 (PMVE)三元共聚物 ,通过1 9F NMR测定了这类三元共聚物的组成 ,结果与按竞聚率的计算结果吻合 .进一步分别用DSC和WAXD表征了玻璃化温度和结晶度 ,实验结果发现用这类三元共聚物制成的硫化胶的性能与其组成和微观结构密切相关