Effects of silicon negative ion implantation in semi-insulating gallium arsenide

ABSTRACT

In the present work, effects of silicon negative ion implantation into semi-insulating gallium arsenide (GaAs) samples with fluences varying between 1?×?10¹⁵ and 4?×?10¹⁷?ions?cm^?2 at 100?keV have been described. Atomic force microscopic images obtained from samples implanted with fluence up to 1?×?10¹⁷?ion?cm^?2 showed the formation of GaAs clusters on the surface of the sample. The shape, size and density of these clusters were found to depend on ion fluence. Whereas sample implanted at higher fluence of 4?×?10¹⁷?ions?cm^?2 showed bump of arbitrary shapes due to cumulative effect of multiple silicon ion impact with GaAs on the same place. GXRD study revealed formation of silicon crystallites in the gallium arsenide sample after implantation. The silicon crystallite size estimated from the full width at half maxima of silicon (111) XRD peak using Debye-Scherrer formula was found to vary between 1.72 and 1.87?nm with respect to ion fluence. Hall measurement revealed the formation of n-type layer in gallium arsenide samples. The current–voltage measurement of the sample implanted with different fluences exhibited the diode like behavior.     

用GXRD和XPS分析离子注入层的表面结构

采用由金属蒸气真空弧(MEVVA)离子源引出的强来流脉冲钨离子对H13钢进行了离子注入表面改性研究。借助掠面X射线衍射(GXRD)和X射线光电子能谱(XPS)考察了注入表面层的相结构以及钨、铁、碳的化学状态。研究发现，表面的含碳化钨层比含铁、钨氧化层要厚，离子注入层中钨元素以替位钨和三氧化钨形式存在，铁元素以金属铁和三氧化二铁形式出现，而又各价态元素的原于比随深度变化。     

用掩蔽注入法研究钛注入H13钢的耐磨性

采用由金属蒸汽真空弧离子源引出的强束流钛、碳离子对H13钢进行表面改性研究.钛和碳离子注入剂量分别为3×1017和1×1017cm-2,引出电压分别为48和30kV，平均束流密度分别为47和20μA·cm-2.为了保持相同的摩擦磨损实验条件，注 入过程中采用掩蔽注入技术.摩擦磨损实验结果表明，钛离子注入H13钢提高了其耐磨性，并大幅度降低其摩擦系数.利用卢瑟福背散射谱测量了离子注入表面的成分，并采用逐层递推 法得出了钛在H13钢中的浓度深度分布，借助掠面x射线衍射考察了注入表面的相结构. 关键词： 钛离子注入 金属蒸汽真空弧 卢瑟福背散射 掠面x射线衍射