铝互连线的电迁移问题及超深亚微米技术下的挑战

铝互连线的电迁移问题历来是微电子产业的研究热点，其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始，超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发，分析概括了铝互连电迁移问题的研究方法，总结了上世纪至今关于铝互连电迁移问题的主要经验；最后结合已知的结论和目前芯片制造业现状，分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式，提出了解决这些问题的总方向. 关键词： 电迁移 铝互连 微结构     

X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

Converged properties of clean metal surfaces by all-electron first-principles calculations

All-electron full-potential linearized augmented plane-wave calculations of the surface energy, work function, and interlayer spacings of close-packed metal surfaces are presented, in particular, for the free-electron-like metal surfaces, Mg(0 0 0 1) and Al(1 1 1), and for the transition metal surfaces, Ti(0 0 0 1), Cu(1 1 1), Pd(1 1 1), and Pt(1 1 1). We investigate the convergence of the surface energy as a function of the number of layers in the slab, using the Cu(1 1 1) surface as an example. The results show that the surface energy, as obtained using total energies of the slab and bulk from separate calculations, converges well with respect to the number of layers in the slab. Obviously, it is necessary that bulk and surface calculations are performed with the same high accuracy. Furthermore, we discuss the performance of the local-density and generalized gradient approximations for the exchange-correlation functional in describing the various surface properties.     

The response of thermally and optically stimulated luminescence from Al2O3:C to high-energy heavy charged particles

The thermoluminescence (TL) and optically stimulated luminescence (OSL) response of Al₂O₃ dosimeters to high-energy heavy charged particles (HCP) has been studied using the heavy ion medical accelarator at Chiba, Japan. The samples were Al₂O₃ single-crystal chips, of the type usually known as TLD-500, and Luxel^TM dosimeters (Al₂O₃:C powder in plastic) from Landauer Inc. The samples were exposed to ⁴He (150 MeV/u), ¹²C (400 MeV/u), ²⁸Si (490 MeV/u) and ⁵⁶Fe (500 MeV/u) ions, with linear energy transfer values covering the range from 2.26 to 189 keV/μm in water and doses from 1 to 100 mGy (to water). A ⁹⁰Sr/⁹⁰Y beta source, calibrated against a ⁶⁰Co secondary standard, was used for calibration purposes. For OSL, we used both continuous-wave OSL measurements (CW-OSL, using green light stimulation at 525 nm) and pulsed OSL measurements (POSL, using 532 nm stimulation from a Nd:YAG Q-switched laser). The efficiencies (η_HCP,γ) of the different HCPs at producing OSL or TL were observed to depend not only upon the linear energy transfer (LET) of the HCP, but also upon the sample type (single crystal chip or Luxel^TM) and the luminescence method used to define the signal—i.e. TL, CW-OSL initial intensity, CW-OSL total area, or POSL. Observed changes in shape of the decay curve lead to potential methods for extracting LET information of unknown radiation fields. A discussion of the results is given, including the potential use of OSL from Al₂O₃ in the areas of space radiation dosimetry and radiation oncology.     

A turbidimetric method to measure isoelectric points and particles deposition onto massive substrates

A simple experimental approach was developed to determine the adhesion rate of particles onto massive substrate. Turbidimetry measurements are used to follow the evolution of particle concentration in a suspension in dynamic contact with the walls of a vessel made of different materials. This method allows to rapidly obtain qualitative results about the adhesion of metallic oxides particles on massive substrates. Adhesion of particles of charged latex onto glass was used to validate the approach and was shown to be a method to determine isoelectric points (IEP) of massive substrates. Then, the adhesion of an iron oxide (hematite) particles onto several substrates was studied to determine the reactivity of current labware (glass, polypropylene) and on a metal (aluminum) commonly found in industrial fouling problems. Adhesion of hematite was found to be pH-dependant, and occurs only below ca. 6 (glass) or 7 (polypropylene), and above 7 (aluminum). DLVO calculations were performed to model the hematite/water/glass system and are consistent with the experimental results. Experiments at temperature 7–50 °C have shown an increasing of the adhesion rate from 7 to 40 °C, then a constant value until 50 °C.     

三氯化钛存在下碘酸钾滴定法测定锡

提出了采用铝加铁混合还原剂还原,三氯化钛存在下碘酸钾滴定法测定锡的绝对测量方法,研究了三氯化钛抑制氧的作用效果及作用机理。应用于巴氏合金中锡含量的测定,方法简便、快速,结果准确可靠。     

RuO<Subscript>2</Subscript>–TiO<Subscript>2</Subscript> mixed oxide composite coating for improvement of Al-alloy sacrificial anodes

It has been recently proved that RuO₂ can act as an effective surface activator of aluminum alloy sacrificial anodes. TiO₂ has the property of stabilizing RuO₂ coating and resisting biofouling on metal surfaces. Hence, a mixed oxide catalytic coating of TiO₂ and RuO₂ can enhance the galvanic performance of aluminum alloy sacrificial anodes and resists biofouling on the anode surface. In the present work RuO₂–TiO₂ mixed oxide was coated on aluminum alloy sacrificial anodes. The large and uniform porous nature of the coating was found to facilitate efficient ion diffusion. The coating was found to persist on the anode even after 3 months of galvanic exposure. The anode having an optimum combination of the mixed oxide had 70% TiO₂ as the major component in the coating. The catalytic coating significantly improved the performance of the anodes to a large extent.     

碱改性γ－Al_2O_3催化剂表面碱强度分布与COS水解活性的研究

用非水滴定法和Ｈａｍｍｅｔｔ系列指示剂测定了ＣＯＳ水解碱改性γ－Ａｌ_２Ｏ_３催化剂的表面碱强度分布．发现表面碱强度分布不均匀与表面能量分布不均匀相呼应．采用零点酸碱强度（Ｈ_（０，ｍａｘ））及碱中心区域分析法，Ｂｒｏｎｓｔｅｄ催化定律，进一步证实ＣＯＳ水解反应具有明显碱催化特征，较高活性催化剂的Ｈ_（０，ｍａｘ）一般为１０左右，对ＣＯＳ水解反应起主要作用的碱性中心的碱强度（Ｈ_０）为４．８≤Ｈ_０≤９．８．对碱金属氧化物改性后的γ－Ａｌ_２Ｏ_３催化剂，Ｂｒｏｎｓｔｅｄ规律在每个碱强度分区域内是适用的．     

光度法测定水样中铝

研究了铝与对乙酰基偶氮胂(ASApA)显色反应,在pH 4.7的HOAc-NaOAc缓冲溶液中,Al3+与ASApA显色形成1:2络合物,最大吸收波长位于612 nm,ε-8.19×103L·mol-1·cm-1,铝量在0～2.8μg·ml-1范围内遵守比耳定律,用于水样中铝的测定,结果满意。