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光刻胶灰化工艺与深亚微米线条的制作   总被引:5,自引:1,他引:4  
随着器件尺寸的缩小,细线条的制作成为很关键的工艺,普通光学光刻已接近其分辨率的极限,而电子束光刻和X射线光刻技术复杂、费用昂贵。本文对光刻胶灰化工艺进行了分析和研究,并应用此工艺进行了深亚微米线条的制作,在普通光学光刻机上制作出宽度小于0.25μm细线条。我们已将此工艺成功地应用在深亚微米MOSFET的制作中。  相似文献   
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Various types of LU-factorizations for nonsingular matrices, where L is a lower triangular matrix and U is an upper triangular matrix, are defined and characterized. These types of LU-factorizations are extended to the general m × n case. The more general conditions are considered in the light of the structures of [C.R. Johnson, D.D. Olesky, P. Van den Driessche, Inherited matrix entries: LU factorizations, SIAM J. Matrix Anal. Appl. 10 (1989) 99-104]. Applications to graphs and adjacency matrices are investigated. Conditions for the product of a lower and an upper triangular matrix to be the zero matrix are also obtained.  相似文献   
5.
A new oxazolidine derivative was obtained from phenol, 2‐amino‐2‐methylpropane‐1,3‐diol and paraformaldehyde. The reaction of this novel oxazolidine diol with phenylisocyanate lead to a urethane model compound which can be polymerized thermally by oxazolidine ring opening to give a Mannich bridge structure. Linear segmented polyurethanes were prepared by reaction of different ratios of oxazolidine diol and commercial polyethylenglycol (Mw ~ 400) with 4,4′‐methylenbis (cyclohexylisocyanate) (HMDI, 90% isomers mixture). The polyurethanes were thermally characterized and crosslinked by oxazolidine ring opening to obtain materials which showed improved thermal stability. © 2007 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 4965–4973, 2007  相似文献   
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In this paper we report the results of a morphological and structural investigation on film properties of a soluble polydiacetylene, the poly[1,6-bis(3,6-dihexadecyl-N-carbazolyl)-2,4-hexadiyne] (polyDCHD-HS). The red films of this polymer, prepared by standard spin-coating techniques, revealed absence of linear dichroism and birefringence in contrast with the ordered mesophases detected by powder X-ray studies. In order to interpret the optical behavior of this polymer, we performed AFM and SEM studies of polyDCHD-HS films spun on hydrophylic and hydrophobic glass substrates. We found the presence of surfaces organized in rod-like particles, more regularly oriented on the hydrophylic substrate. GIXRD studies, carried out on films sufficiently thick to allow the observation of the diffraction pattern, reveled the presence of a lamellar structure with a spacing of 3.22 nm. The low intensity of the diffraction peaks and the isotropic linear optical properties of the films show that the lamellar mesophases are not extended over large areas. These findings were compared with the data obtained from AFM and SEM studies on films of two other polydiacetylenes, the poly[1-(3,6-dihexadexyl-N-carbazolyl)-6-(N-carbazolyl)-2,4-hexadyine] (polya-DCHD) and the poly[1,6-bis(3,6-dipalmitoyl-N-carbazolyl)-2,4-hexadyine] (polyDPCHD), spun on hydrophylic glass substrate. The results confirmed the presence of nodular morphologies which seem to be a general characteristic of this class of materials. The particles organization appears instead related to the chemical nature of the substituents on the carbazolyl rings.  相似文献   
7.
In this paper the performance of a packet mobile radio network is studied inthe presence of shadow fading outage intervals.Under quite general assumptions for the medium access protocol,the probability mass function of the sequence of packets that may be lostdue to an outage interval is derived. It is seen that long sequences of lostpackets are likely to occur for typical values of the mobile speed andshadowing correlation parameters.For delay constrained sources, e.g., voice, the analysis is mainly focused atderiving the probability function of the sequence of dropped packetsand the probability of dropping. For data sources, the delay statistic isalso derived. In the latter case, the effect of finite buffer length isaddressed. Simulation is used to verify the accuracy of approximations introduced in the analysis.  相似文献   
8.
Marina DellaGreca 《Tetrahedron》2006,62(12):2877-2882
Examination of the hydroalcoholic extract of the leaves of Aptenia cordifolia has afforded three cinnamic acid amides and two lignanamides. Structures were established on the basis of spectroscopic data, including 2D-NMR analyses.  相似文献   
9.
Summary The role of multivariate analysis methods in evaluating, rationalizing, and working out complex environmental problems is discussed. The discussion is organized in two sections; a literature analysis of the application of chemometric methods to PCDD/PCDF data interpretation and source correlation and a review of the role of chemometric methods in analysing the results obtained by the Authors studying PCDD/PCDF formation and destruction mechanisms in MSW combustion processes.  相似文献   
10.
Previous research has shown that the flow of patients around departments of geriatric medicine and ex-patients in the community may be modelled by the application of a mixed-exponential distribution. In this paper we considered a five-compartment model using a continuous-time Markov process to describe the flow of patients. Using a M/Ph/c queuing model, we present a way of optimizing the number of beds in order to maintain an acceptable delay probability at a sufficiently low level. Finally, we constructed a Java computer simulation, using data from St George’s Hospital, London.  相似文献   
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