排序方式： 共有28条查询结果，搜索用时 15 毫秒
1.
Wu DY Hayes K Perl ML Barklow T Boyarski A Burchat PR Burke DL Dorfan JM Feldman GJ Gladney L Hanson G Hollebeek RJ Innes WR Jaros JA Karlen D Klein SR Lankford AJ Larsen RR LeClaire BW Lockyer NS Lüth V Ong RA Richter B Riles K Yelton JM Abrams G Amidei D Baden AR Boyer J Butler F Gidal G Gold MS Goldhaber G Golding L Haggerty J Herrup D Juricic I Kadyk JA Levi ME Nelson ME Rowson PC Schellman H Schmidke WB Sheldon PD Trilling GH Wood DR Schaad T 《Physical review D: Particles and fields》1990,41(7):2339-2342
2.
Petradza M Thun R Abrams G Amidei D Baden AR Barklow T Boyarski A Boyer J Burchat PR Burke DL Butler F Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Haggerty J Jaros JA Kadyk JA Karlen D Lankford AJ Larsen RR LeClaire BW Levi ME Lockyer NS Lüth V Nelson ME Ong RA Perl ML Richter B Riles K Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH Wood DR Yelton JM 《Physical review D: Particles and fields》1990,42(7):2171-2179
3.
Ong RA Weir AJ Abrams GS Amidei D Baden AR Barklow T Boyarski AM Boyer J Burchat PR Burke DL Butler F Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Golding L Haggerty J Hanson G Hayes K Herrup D Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Karlen D Klein SR Lankford AJ Larsen RR LeClaire BW Levi M Lockyer NS Lüth V Nelson ME Perl ML Petersen A Richter B Riles K Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH Wood DR Yelton JM 《Physical review letters》1988,60(25):2587-2590
4.
Klein SR Himel TM Abrams G Amidei D Baden AR Barklow T Boyarski AM Boyer J Burchat PR Burke DL Butler F Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Golding L Haggerty J Hanson G Hayes K Herrup D Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Karlen D Lankford AJ Larsen RR LeClaire BW Levi M Lockyer NS Lüth V Matteuzzi C Nelson ME Ong RA Perl ML Petersen A Richter B Riles K Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH de la Vaissiere C Wood DR Yelton JM 《Physical review letters》1987,58(7):644-647
5.
Gidal G Boyer J Butler F Cords D Abrams GS Amidei D Baden AR Barklow T Boyarski AM Burchat P Burke DL Dorfan JM Feldman GJ Gladney L Gold MS Goldhaber G Golding LJ Haggerty J Hanson G Hayes K Herrup D Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Karlen D Klein SR Lankford AJ Larsen RR LeClaire BW Levi ME Lockyer NS Lüth V Matteuzzi C Nelson ME Ong RA Perl ML Richter B Riles K Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH de la Vaissière C Wood DR Yelton JM Zaiser C 《Physical review letters》1987,59(18):2016-2019
6.
de la Vaissiere C Luth V Abrams GS Amidei D Baden AR Barklow T Boyarski AM Boyer J Breidenbach M Burchat P Burke DL Butler F Dillon JW Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Golding LG Hanson G Haggerty J Herrup D Himel T Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Klein SR Lankford AJ Larsen RR LeClaire BW Levi ME Lockyer NS Matteuzzi C Nelson ME Ong RA Perl ML Richter B Ross MC Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH Yelton JM Wood DR 《Physical review letters》1985,54(19):2071-2074
7.
K. Wang A. Chelnokov S. Rowson J.-M. Lourtioz 《Applied Physics A: Materials Science & Processing》2003,76(7):1013-1016
We show the very particular behavior of focused-ion-beam etching in macroporous silicon. We demonstrate that, contrary to
bulk samples, a porous substrate allows extremely high-aspect-ratio patterns to be etched at submicrometer scales. Thanks
to the pre-introduced porosity, the secondary effects that limit the pattern depth in bulk-sample etching, namely the sputtered
material redeposition as well as the beam ‘self-focusing’ effects, are strongly reduced in a porous sample. In this case the
walls between the pores are sputtered in an almost independent way. The etching of deep and straight patterns is feasible.
Combined with photoelectrochemical etching that generates the initial macropores, three-dimensional (3D) lattices can be obtained,
as demonstrated by 3D photonic crystal fabrication.
Received: 21 August 2002 / Accepted: 21 August 2002 / Published online: 12 February 2003
RID="*"
ID="*"Corresponding author. Fax: +33-1/6915-6086, E-mail: wang@lps.u-psud.fr 相似文献
8.
Butler F Boyer J Gidal G Abrams G Amidei D Baden AR Gold MS Goldhaber G Golding L Haggerty J Herrup D Juricic I Kadyk JA Levi ME Nelson ME Rowson PC Schellman H Schmidke WB Sheldon PD Trilling GH Wood DR Riles K Perl ML Barklow T Boyarski A Burchat PR Burke DL Dorfan JM Feldman GJ Gladney L Hanson G Hayes K Hollebeek RJ Innes WR Jaros JA Karlen D Klein SR Lankford AJ Larsen RR LeClaire BW Lockyer NS Lüth V Ong RA Richter B Yelton JM Schaad T 《Physical review D: Particles and fields》1990,42(5):1368-1384
9.
Klein SR Himel T Abrams G Amidei D Baden AR Barklow T Boyarski AM Boyer J Burchat PR Burke DL Butler F Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Haggerty J Hanson G Hayes K Herrup D Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Karlen D Lankford AJ Larsen RR LeClaire BW Levi M Lockyer NS Lüth V Nelson ME Ong RA Perl ML Richter B Riles K Rowson PC Schaad T Schellman H Schmidke WB Sheldon PD Trilling GH de la Vaissiere C Wagner SR Wood DR Yelton JM 《Physical review letters》1989,62(21):2444-2447
10.
Sheldon PD Trilling GH Petersen A Abrams G Amidei D Baden AR Barklow T Boyarski AM Boyer J Burchat PR Burke DL Butler F Dorfan JM Feldman GJ Gidal G Gladney L Gold MS Goldhaber G Golding L Haggerty J Hanson G Hayes K Herrup D Hollebeek RJ Innes WR Jaros JA Juricic I Kadyk JA Karlen D Lankford AJ Larsen RR LeClaire BW Levi M Lockyer NS Lüth V Matteuzzi C Nelson ME Ong RA Perl ML Richter B Riles K Ross MC Rowson PC Schaad T Schellman H Schmidke WB de la Vaissiere C Wood DR Yelton JM Zaiser aC 《Physical review letters》1986,57(12):1398-1401