高温热处理气氛对低氟MOD法制备YBCO超导薄膜的影响研究

金属有机物沉积法(MOD)制备YBa2Cu3O7-x(YBCO)涂层导体是最具有商业前景的方法之一.本文使用环烷酸铜代替三氟乙酸铜,降低了前驱液中大约50%的氟含量.然后在带有缓冲层(Y2O3/YSZ/CeO2)的Ni-5at.%W基带上采用MOD法制备了YBCO薄膜并系统研究了高温热处理过程中气体流速和氧分压对YBC...     

Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices

This paper presents high quality YBa₂Cu₃O_7-δ(YBCO) thin films on LaAlO₃ substrate for microwave devices prepared by pulsed laser deposition(PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance(Rs).This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To ev...     

YBCO涂层导体用YSZ缓冲层的快速制备研究

基于反应直流溅射法,采用镶嵌有钇粒的金属锆作为靶材,去离子水蒸汽为氧化反应气体,在有Y2O3种子层的双轴织构Ni-5at.%W基带上,系统地研究了温度和卷绕速度对YSZ阻挡层薄膜结构及表面形貌的影响。X射线衍射(XRD)分析表明,生长温度在700℃时制备的薄膜呈现明显的(002)取向;原子力显微镜(AFM)分析显示,该温度下制备的薄膜表面致密、无孔洞、无裂纹。在不同的卷绕速度下,虽然薄膜均为纯c轴取向,但其均方根粗糙度(RMS)和微粒大小均有较大差别。快速制备可达到抑制基片表面氧化、助于薄膜取向改善、提高薄膜制备效率的目的。