非固定环带随机双面抛光技术研究

提出了一种基于平移偏摆运动的非固定环带随机双面抛光的方法,通过设计平移偏摆装置使得工件运动方式脱离固定环带的限制,借助随机性运动进行迭代,解决了行星式双面抛光等固定环带抛光过程中产生的周期性轨迹问题;通过优化运动方式组合,在随机性运动叠加情况下实现了大口径超薄元件面形稳定收敛控制。与行星式双面抛光相比,不仅面形精度更好,而且没有明显的周期性加工痕迹。该方法可以应用到对表面激光损伤阈值有特殊要求的超薄件批量生产当中。     

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage,which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics.In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO_2, Al_2O_3, ZrO_2, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities.Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.     

3mm厚大口径超薄元件双面抛光工艺北大核心CSCD

基于环摆双面抛光技术,研究了3mm厚大口径超薄元件的双面抛光加工工艺。通过对双面抛光原理的分析,对转速比、抛光垫面形、抛光液等工艺参数上作了优化,并通过加工模拟进行验证。通过工件环分离器减薄技术解决了3mm厚超薄元件的装夹问题。在SYP152双面主动抛光机上进行了加工工艺实验,通过调节转速比实现3mm厚大口径超薄元件面形的高效收敛,验证了加工的可行性,并且达到了面形精度优于1.5λ(λ=632.8nm)、表面粗糙度优于1nm的技术水平。