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用RF溅射制备厚度为200 nm的Fe-N薄膜在250℃, 12000 A/m磁场下真空热处理后,当N含量在5%~7%(原子百分数)范围内形成α′+α″相时,4πMS可达2.4 T, Hc<80 A/m, 2~10 MHz下高频相对导磁率μr=1500,可满足针对10 Gb/in2存储密度的GMR/感应式复合读写磁头中写入磁头的需要. Fe-N系薄膜中α′相的形成机理和点阵常数与块状试样按Bain机理形成的α′相有明显的差别,得到了薄膜中α′相的a,c与Cα′N之间的线性关系式. 相似文献
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The structure and magnetic properties of Fe- N thin films 总被引:1,自引:0,他引:1
200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was in the range of 5-7 at. %,the thin films consisted of α′ + α" after heat treatment and had excellent soft magnetic properties of 4πMs = 2.4 T, Hc < 80 A/m, μr = 1500 under 2-10 MHz. The properties of the films meet the needs of a write head material used in the dual element GMR/inductive heads. The fromation mechanism and lattice constants of the α′ phase in Fe-N thin film are different from Jack's results obtained from γ→α′transformation in bulk samples. The linear relationship between a, c and Ca'N for thin film was obtained asc = 2. 866+ 1.559Ca'N,a = 2.866 + 0.181Ca'N.`` 相似文献
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CRYSTALLINE CARBON NITRIDE THIN FILMS DEPOSITED BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION 下载免费PDF全文
The crystalline carbon nitride thin films have been prepared on Si (100) substrates using microwave plasma chemical vapor deposition technique. The experimental X-ray diffraction pattern of the films prepared contain all the strong peaks of α-C3N4 and β-C3N4, but most of the peaks are overlapped.The films are composed of α-C3N4 and β-C3N4. The N/C atomic ratio is close to the stoichiometric value 1.33. X-ray photoelectron spectroscopic analysis indicated that the binding energies of C 1s and N 1s are 286.43eV and 399.08 eV respectively. The shifts are attributed to the polarization of C-N bond. Both observed Raman and Fourier transform infrared spectra were compared with the theoretical calculations. The results support the existence of C-N covalent bond in α- and β-C3N4 mixture. 相似文献
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用RF磁控溅射方法,在高功率下制备厚度为2μm的薄膜,当N含量在5.9~8.5;原子分数范围内,形成α′+α″相时,4πMs=2.2T,Hc=58.6A/m,可以满足针对高存储密度的GMR/感应式复合读写磁头中写入磁头的需要.用该方法在不同的本底真空度下制备Fe-N薄膜,发现较高真空下比较低真空下制备的Fe-N薄膜磁学性能要好.P=1000W时,较高真空下制备的Fe-N薄膜的矫顽力为34.8A/m,较低真空下制备的Fe-N薄膜的矫顽力为58.6A/m.AFM测试表明,在功率条件相同情况下,较高真空下制备的Fe-N薄膜表面光滑、平整、起伏小、薄膜致密;而较低真空下制备的Fe-N薄膜,表面粗糙、起伏大、薄膜较疏松、不均匀. 相似文献
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