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Comparison of Bottom-up Filling in Electroless Plating with an Addition of PEG,PPG and EPE 总被引:1,自引:0,他引:1
The bottom‐up filling capabilities of electroless copper plating bath with an addition of additives, such as polyethylene glycol (PEG), polypropylene glycol (PPG) and triblock copolymers of PEG and PPG with ethylene oxide terminal blocks termed EPE, were investigated by the cross‐sectional scanning electron microscopy (SEM) observation of sub‐micrometer trenches. Though three additives had inhibition for electroless copper deposition, the suppression degrees of three additives were different. EPE‐2000 had the strongest suppression for electroless copper deposition, and the suppression of PEG‐2000 was the weakest. The bottom‐up filling capability of electroless copper was investigated in a plating bath containing different additives with the concentration of 2.0 mg/L. The cross‐sectional SEM observation indicated the trenches with the width of 280 nm and the depth of 475 nm were all completely filled by the plating bath with an addition of EPE‐2000, but the trenches were not completely filled by the plating bath with an addition of PEG‐2000 or PPG‐2000, and some voids appeared. Linear sweep voltammetry measurement indicated that three additives all inhibited the cathodic reduction reaction and the anodic oxidation reaction, and the inhibition of EPE‐2000 was the strongest among three additives, which agreed with that of the deposition rate of electroless copper. Significant differences in surface roughness of deposited copper film were observed by UV‐visible near‐infrared for different suppressors, and the bright and smooth of deposited copper film were in accordance with the inhibition of three additives. 相似文献
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用TG-DTA,高温X-射线衍射研究了稀土间硝基苯甲酸配合物LnL_3·nH_2O(n=2,Ln=La→Lu+Y;n=0,Ln=Sc,HL=间硝基苯甲酸)的热分解行为,DSC测定其脱水相变过程中的热力学函数,同时用透射电镜观察了热分解产物的超微性。 相似文献
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用pH电位法测定了生理条件(37℃,I=0.15mol/L)和25℃,I=0.10mol/L时甘氨酰L-亮氨酸的质子化常数及其稀土配合物稳定常数。结果表明稀土可与该配体形成1:1配合物,并且配合物稳定性呈现明显“四分组效应”。讨论了钇的位置以及肽键对配合物稳定性的影响。 相似文献
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用冷坩埚磁悬浮熔炼方法制备La0.7Mg0.3(Ni0.85-xCo0.15Alx)3.4(x=0.00,0.04)和La0.7-yNdyMg0.3(Ni0.81Co0.15Al0.04)3.4(y=0.10)贮氢合金,采用XRD,FESEM,EDS,P-C-T测试及三电极电化学性能测试研究合金的相结构、相成分、P-C-T曲线、电化学性能及相应电极的表面状态。Rietveld法全谱拟合表明,La0.7Mg0.3(Ni0.85Co0.15)3.4合金为多相结构,主相为Ce2Ni7型六方相,主相成分为(La,Mg)(Ni0.85Co0.15)2.9-3.3。P-C-T曲线显示随着Al和Nd的依次替代,平台压力从0.0118 MPa降低到0.0057 MPa再升高到0.0073 MPa。电化学性能测试表明,最大放电容量先从392.9 mAh.g^-1降低到363.4 mAh.g^-1再降低到343.7 mAh.g^-1,循环稳定性则从59.6%增加到73.1%再增加到79.7%。 相似文献
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