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A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors
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An optical microelectromechanical-system (MEMS) pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel analytical approach and the traditional transfer matrix method. The analytical expressions of the deflection of multi-layer diaphragm and absolute optical reflectance are derived respectively. The influence of residual stress on the deflection of diaphragm is also analysed. Simulation results given by the finite element method are consistent with the ones which are analysed by using the analytical approach. The analytical approach will be helpful to design and fabricate the optical MEMS pressure sensors with multi-layer diaphragm based on Fabry-Perot interferometry. 相似文献
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Ar—Kr溶液扩散系数的分子动力学模拟及其与温度的关系 总被引:2,自引:1,他引:2
用分子动力学模拟方法研究确定Ar-Kr溶液的自扩散系数D1、D2和互扩散系数D12以及它们随温度变化的规律。结果表明,分别用Green-Kubo法和Einstein法得到的扩散系数在数值上一致;该溶液的3种扩散系数均满足D=D0e^E/RT关系。 相似文献
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在某些金属盐存在下,醚可与酰氯反应生成酯,早期文献中对于此类反应曾有过报道,其中所用的金属盐有三氯化铁或氯化锌,其相对用量较大,酯的得率较差。其后,Alper等提出用第五族金属羰基化合物和酰氯,如Mo(CO)_4-RCOCl为试剂,进行醚的开裂;近期则有Pri-Bar等用Pd(Ⅱ)-R_3SnX- 相似文献
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手性配体立体选择性萃取分离扁桃酸对映体 总被引:6,自引:0,他引:6
Based on chiral ligand exchange, the distribution behavior of mandelic acid enantiomers in the two-phase system containing copper ion(Ⅱ)(Cu2+) and N-n-dedecane-L-hydroxyproline (L), was studied. At different pH, the partition of Cu2+ in the two-phase system containing N-n-dedecane-L-hydroxyproline, was investigated. The formation constant of binary cpmplex(Li2Cu) was obtained by regression. The influence of pH, concentrations of Cu2+ and chiral ligand, and solvents on partition coefficients(K) and separation factor(α), was discussed. The experimental results show that Li forms more stable ternary complex with D-mandelic acid than with L- mandelic acid. There is a large influence of pH on K and α. At low pH values (<3.5), formation of binary complexes is thermodynamically unfavourable. K and α are best when pH values are above 3.5 and the molar ratio of chiral ligand to Cu2+ is 2∶1. At the same time, solvents influence K and α very much. 相似文献
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The effects of ion implantation on ployacetylene films PA have been studied with Ar~+, Fe~+, C1~+, I~+, Na~+ and K~+ ions in the energy range of 15—30 keV. The changes of PA films in the electrical conductivity, due to chemical doping and ion implantation in relation to their structure and depth profiles of impurities, were measured through infrared (ATR/FTIK), Rutherford backscattering spectrometry (RBS) and the four probe technique. In all cases, ion implantation of active ions exhibits the same effects as chemical doping. The formation of p-n junction is observed at the interface of implanted region and chemical doped PA substrate. The mechanism of interaction process between ion beam and polymer is also discussed. 相似文献
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