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感应耦合等离子刻蚀技术研究 总被引:2,自引:0,他引:2
依据感应耦合等离子体的刻蚀机理,对影响刻蚀的两个重要参数及先进的硅刻蚀技术进行了较深入的研究,并对影响刻蚀效果的参数进行了实验研究,刻蚀出了20μm深,2μm宽的谐振器结构,得到了最佳的工艺参数。 相似文献
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应用中心流形对一类含有二次和三次非线性项的Duffing系统降维,并数值模拟出其分岔图及Lyapunov指数图,对其进行分析,进一步研究其稳定性及分岔特性. 相似文献
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Multi-gap Resistive Plate Chamber (MRPC) is a new generation of gas detector with good timing and spacial resolution, whose technique is widely applied in some recent high energy (nuclear) physics experiments. In this letter, we report a long-strip two-end readout MRPC and its test beam performance. The measurements show that the long-strip performs a transmission line characteristic and the impedance is independent of the length of strip. The MRPC module we developed is presented to gain a timing resolution of -80 ps and a spacial resolution of -6.4 mm. The possible application of the MRPC is also discussed. 相似文献
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In economic order quantity models without backordering, both the stock cost of each unit quantity and the order cost of each cycle are characterized as independent fuzzy variables rather than fuzzy numbers as in previous studies. Based on an expected value criterion or a credibility criterion, a fuzzy expected value model and a fuzzy dependent chance programming (DCP) model are constructed. The purpose of the fuzzy expected value model is to find the optimal order quantity such that the fuzzy expected value of the total cost is minimal. The fuzzy DCP model is used to find the optimal order quantity for maximizing the credibility of an event such that the total cost in the planning periods does not exceed a certain budget level. Fuzzy simulations are designed to calculate the expected value of the fuzzy objective function and the credibility of each fuzzy event. A particle swarm optimization (PSO) algorithm based on a fuzzy simulation is designed, by integrating the fuzzy simulation and the PSO algorithm. Finally, a numerical example is given to illustrate the feasibility and validity of the proposed algorithm. 相似文献
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《南方日报》2000年3月7日刊登了一篇题为《光子产业,二十一世纪最有前途的产业》的文章,介绍了朗讯公司与由广东省信息产业厅牵头,省信息中心、广州市信息中心等部门参与的建设以广州为中心的光子产业带(即光谷)的有关材料。这无疑是向我们发出了信号,时代已奏响了发展信息产业的最强音。而新会早在几年前也在省的统一部署下有了自己的信息产业。截至今天,新会市信息产业取得了一定的成绩。 相似文献
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On the Ascending Subgraph Decompositions Problem 总被引:1,自引:0,他引:1
Inthispaper,weconsideronlysimpleundirectedgraphsandfollowBondyandMurtyl7]forterminologyandnotationnotdefinedhere.Y.Alaviandothershavegiventhedefinitionoftheascendingsubgraphdecomposionin[1].LetGbeagraphofqedgessatisfy(" 1)5q<(" ,).ThenGissaidtohavean... 相似文献
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研究了一类基本的双自由度碰撞振动系统的碰撞运动.运用理论推导的方法找到了其碰撞运动的颤振完成点及其颤振时间,针对该碰撞系统中颤振导致的碰撞问题,找到了一种有效的研究该碰撞系统中颤振现象的数值方法,并用数值仿真的方法研究了系统的动态响应及擦边现象,验证了理论推导的正确性. 相似文献
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简要介绍了图的关联着色问题的起源、发展情况及目前已有的结论,对一类特殊的图——极大外平面图(△≠6),给出了其关联色数. 相似文献