Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

智能光网络控制平面技术

光网络的智能化是下一代光网络发展的主要趋势,在对智能光网络发展背景进行分析的基础上,对光网络控制平面技术进行了讨论,重点分析了光网络控制平面的功能模型、主要功能、应用协议和控制平面的可靠性等问题。     

高速光通信系统中的色散问题及其补偿研究

当光纤通信系统单信道速度升级到40Gbit/s及以上时，色度色散（CD）和偏振模色散（PMD）已经成为严重影响系统性能的主要因素。本文主要从补偿的必要性、关键技术、主要方法和解决方案等方面分别对CD和PMD及其补偿进行了较详细的研究。     

OADM环网的实验研究

研究了光分插复用器(OADM)的关键技术,重点分析了相关的实现技术,完成了利用OADM构建全光环网的实验研究,给出了重要的实验数据,包括眼图、光谱图、光信噪比、保护与恢复等,并对这些实验数据进行了分析,为光传送网的设计与构建提供了重要的参考依据.