Optimal design of gears contact interface modification for an objective as minimum impact resistance of initial meshing-in time domain

Meccanica - In gear pair actual alternating meshing process, the comprehensive errors of the transmission system and the thermal elastic deformation of the teeth body cause the gears in the meshing...     

Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

CARS光谱测温及仪器狭缝函数对测量的影响

设计了一种利用光参量振荡器(OPO)来代替染料激光器的宽带相干反斯托克斯喇曼散射(CARS)光谱测温实验装置。为了提高CARS测量温度的精度,测量和分析了检测系统中狭缝函数对测量结果的影响,确定了狭缝函数的具体形式。将测量结果与热电偶读数比较,发现在温度范围300K～1200K内,温度测量的不确定度小于2%。