Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

A new trigonometric method of summation and its application to the degree of approximation

The object of the present investigation is to introduce a new trigonometric method of summation which is both regular and Fourier effective and determine its status with reference to other methods of summation (see §2-§4) and also give an application of this method to determine the degree of approximation in a new Banach space of functions conceived as a generalized Holder metric (see §5).     

Investigating laser rapid manufacturing for Inconel-625 components

This paper presents an investigation of laser rapid manufacturing (LRM) for Inconel-625 components. LRM is an upcoming rapid manufacturing technology, it is similar to laser cladding at process level with different end applications. In general, laser-cladding technique is used to deposit materials on the substrate either to improve the surface properties or to refurbish the worn out parts, while LRM is capable of near-net shaping the components by layer-by-layer deposition of the material directly from CAD model. In the present study, a high-power continuous wave (CW) CO₂ laser system, integrated with a co-axial powder-feeding system and a three-axis workstation were used. The effect of processing parameters during LRM of Inconel-625 was studied and the optimum set of parameters for the maximum deposition rate was established employing Orthogonal L9 array of Taguchi technique. Results indicated that the powder feed rate and the scan speed contributed about 56% and 26%, respectively to the deposition rate, while the influence of laser power was limited to 10% only. Fabricated components were subjected to non-destructive testing (like—ultrasonic testing, dye-penetrant testing), tensile testing, impact testing, metallographic examinations and micro-hardness measurement. The test results revealed defect-free material deposition with improved mechanical strength without sacrificing the ductility.