Integration of 2D and 3D Thin Film Glassy Carbon Electrode Arrays for Electrochemical Dopamine Sensing in Flexible Neuroelectronic Implants

Here we present the development and characterization of a flexible implantable neural probe with glassy carbon electrode arrays. The use of carbon electrodes allows for these devices to be used as chemical sensors, in addition to their typical use as electrical sensors and stimulators. The devices are fabricated out of polyimide, platinum, titanium, and carbon with standard microfabrication techniques on carrier wafers. The devices are released from the substrate through either chemical or electrochemical dissolution of the underlying substrate material. The glassy carbon electrode arrays are produced through the pyrolysis of SU‐8 pillars at 900 °C as the first process step, as this temperature is incompatible with the other device materials. The process demonstrated here is generally applicable, allowing for the integration of various high temperature materials into flexible devices.     

In Vivo Electrical Impedance Spectroscopy of Tissue Reaction to Microelectrode Arrays

The goal of this experiment was to determine the electrical properties of the tissue reaction to implanted microelectrode arrays. We describe a new method of analyzing electrical impedance spectroscopy data to determine the complex impedance of the tissue reaction as a function of postimplantation time. A model is used to extract electrical model parameters of the electrode-tissue interface, and is used to isolate the impedance of the tissue immediately surrounding the microelectrode. The microelectrode arrays consist of microfabricated polyimide probes, incorporating four 50-mum-diameter platinum microelectrodes. The devices were implanted in the primary motor cortex of adult rats, and measurements were performed for 12 weeks. Histology was performed on implants at three time points in one month. Results demonstrate that the tissue reaction causes a rapid increase in bioimpedance over the first 20 days, and then stabilizes. This result is supported by histological data.