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Avdic Senada Demirovic Damir Hadzimustafic Edin Cickusic Zerina Sehic Faruk 《Journal of Radioanalytical and Nuclear Chemistry》2022,331(6):2645-2654
Journal of Radioanalytical and Nuclear Chemistry - Responses of the hand-held gamma monitors available for the ambient dose equivalent rate measurements in the Federation of Bosnia and Herzegovina... 相似文献
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Navab SinghAuthor Vitae Moitreyee Mukherjee-RoyAuthor VitaeSohan Singh MehtaAuthor Vitae 《Microelectronics Journal》2003,34(4):237-245
The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging. 相似文献
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Recent developments in the aerobic oxidation of alcohols 总被引:1,自引:0,他引:1
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