基于模式理论光栅椭偏参数反演的数值模拟

将一种广泛用于求解系统优化问题的方法——正单纯形法，求解光栅的椭偏方程。首先，利用求解光栅的傅立叶模式理论对TE和TM波的复反射系数进行求解。然后计算出其相应的椭偏参数(△，Ψ)，并在该值的基础上加入不同偏差的随机高斯噪声，将加入噪声后的值(△m，Ψm)作为模拟测量值。最后使用优化算法进行反演。通过对几种常用面形光栅椭偏参数的数值模拟，一方面表明傅立叶模式理论计算光栅的椭偏参数不仅精度高。而且速度快；另一方面表明利用正单纯形法得到的光栅参数值很接近于正演时假设的参数值，从而从理论上证明了利用椭偏法测量光栅各种光学参数的可行性。     

Surface relief resonant Brewster filters with multiple channels

In this paper, a new type of resonant Brewster filters （RBF） with surface relief structure for the multiple channels is first presented by using the rigorous coupled-wave analysis and the S-matrix method. By tuning the depth of homogeneous layer which is under the surface relief structure, the multiple channels phenomenon is obtained. Long range, extremely low sidebands and multiple channels are found when the RBF with surface relief structure is illuminated with Transverse Magnetic incident polarization light near the Brewster angle calculated with the effective media theory of sub wavelength grating. Moreover, the wavelengths of RBF with surface relief structure can be easily shifted by changing the depth of homogeneous layer while its optical properties such as low sideband reflection and narrow band are not spoiled when the depth is changed. Furthermore, the variation of the grating thickness does not effectively change the resonant wavelength of RBF, but have a remarkable effect on its line width, which is very useful for designing such filters with different line widths at desired wavelength.     

多层介质膜脉冲宽度压缩光栅与超短脉冲作用时的性能分析

基于啁啾脉冲放大技术的超短脉冲激光系统是提供超快、超强激光的重要途径，具有良好输出波形和高损伤阈值的多层介质膜脉冲宽度压缩光栅是获得高峰值功率脉冲激光的关键. 基于傅里叶谱变换方法和严格模式理论，分析了多层介质膜光栅(MDG)在超短脉冲作用下的光学特性. 结果表明，当MDG的反射带宽小于具有高斯分布的入射脉冲的频谱宽度时，-1级反射脉冲呈非对称高斯分布，其前沿出现振荡，并且-1级反射脉冲能量开始剧烈下降. 讨论了MDG结构参数对其反射带宽的影响. 分析了MDG与超短脉冲作用时的近场光分布，对提高其抗激光损 关键词： 脉冲压缩光栅 傅里叶谱变换 模式理论 损伤阈值     

Influences of SiO2 laser-induced protective layers and damage threshold of annealing on the Ta2O5 films

Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition. The effects of SiO2 protective layers and annealing on the laser-induced damage threshold （LIDT） of the films are investigated. The results show that SiO2 protective layers exert little influence on the electric field intensity （EFI） distribution, microstructure and microdefect density but increase the absorption slightly. Annealing is effective on decreasing the microdefect density and the absorption of the films. Both SiO2 protective layers and annealing are beneficial to the damage resistance of the films and the latter is more effective to improve the LIDT. Moreover, the maximal LIDT of Ta2O5 films is achieved by the combination of SiO2 protective layers and annealing.     

Influence of Different Substrates on Laser Induced Damage Thresholds at 1064nm of Ta2O5 Films

Ta2O5 films are prepared on Si, BK7, fused silica, antireflection （AR） and high reflector （HR） substrates by electron beam evaporation method, respectively. Both the optical property and laser induced damage thresholds （LIDTs） at 1064 nm of Ta2O5 films on different substrates are investigated before and after annealing at 673 K for 12 h. It is shown that annealing increases the refractive index and decreases the extinction index, and improves the O/Ta ratio of the Ta2O5 films from 2.42 to 2.50. Moreover, the results show that the LIDTs of the Ta2O5 films are mainly correlated with three parameters： substrate property, substoichiometry defect in the films and impurity defect at the interface between the substrate and the films. Details of the laser induced damage models in different cases are discussed.     

反射型导模共振滤波器设计

导模共振滤波器由于其高峰值反射率,低旁带反射,窄带以及带宽可控等优良特性引起了人们极大的关注,采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能,在弱调制模式下,其共振带宽可以被压缩到零点几纳米,但是由于介质表面和空气层的菲涅耳反射,使得偏离或者远离共振区时的反射率偏高,根据等效介质理论,亚波长光栅在远离共振区可以被看为均匀的薄膜,本文通过对导模共振光栅进行单层、双层以及三层抗反射设计,有效的降低了导模共振光栅的旁带反射率,从而在可见光波段获得了性能优良的共振滤波 关键词： 导模共振 平面波导 傅里叶模式理论 窄带滤波     

Laser-induced damage threshold in n-on-1 regime of Ta_2O_5 films at 532,800,and 1064 nm

Ta_2O5 films were prepared with conventional electron beam evaporation and annealed in O_2 at 673 K for 12h.Laser-induced damage thresholds(LIDTs)of the films were performed at 532 and 1064 nm in 1-on-1 regime firstly,and then were performed at 532,800,and 1064 nm in n-on-1 regime,respectively- The results showed that the LIDTs in n-on-1 regime were higher than that in 1-on-1 regime at 532 and 1064 nm.In addition,in n-on-1 regime,the LIDT increased with the increase of wavelength.Furthermore, both the optical property and LIDT of Ta_2O_5 films were influenced by annealing in O_2.     

用透射光谱法测光栅参数的数值模拟

本文基于光栅的严格理论,提出结合透射光谱和优化算法来测量光栅参数的新方法,首先,利用傅立叶模式理论和反射透射系数递推算法(RTCM) ,计算出在2 0 0 -90 0nm波段内的理论透射光谱图,通过在上面叠加不同偏差的高斯噪声来模拟光栅的实际测量曲线,接着在模拟曲线上任取若干个点作为实验测量值,最后利用优化算法进行反演搜索,找到待测光栅的结构参数。文中我们选择了三种类型的光栅对该法进行数值上的模拟,其结果是成功的。该法可能会给光栅参数的测量指明一条新的途径。     

用亚波长正弦介质光栅设计1/4波片

采用扩展边界条件法,得出亚波长正弦介质光栅正入射反射型1/4波片的结构参数。发现在一定精度范围内TE波与TM波的相位差能够在一段较大的槽深区域满足设计要求,从而降低了实际控制刻蚀深度的难度。讨论了线偏振光转化为圆偏振光的方位角问题。     

一种综合处理光栅矢量衍射的新方法

理论上将Waterman -Rayleigh方法 (WRM) ,傅立叶模方法 (FMM)和坐标变换法 (CM)巧妙结合 ,吸收了三者各自处理多分层光栅的优点 ,摒弃了各自的缺点 ,简化了理论推导。采用WRM方法的形式来表示电磁场 ,以便省去对本征值和本征矢的数值计算时间 ;采用FMM对物理量作矩阵表述 ,以便实现理论推导的简洁性 ,规范性 ;采用CM的坐标变换 ,以便简化对边界条件的匹配 ;在作Fourier展开时采用“逆规则” ,以保持方法的快速收敛性 ;在对多分层光栅的递推计算中 ,采用反射透射系数阵算法 (RTCM) ,以便克服由于层与层之间厚度变大所带来的数值不稳定性 ,同时提高计算速度。总之 ,这种综合处理光栅问题的方法不仅物理概念清晰 ,计算简洁 ,速度快 ,而且准确性 ,稳定性和收敛性均令人满意。