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纳米氧化钨薄膜改性的大孔硅气敏传感器 总被引:2,自引:2,他引:0
通过双槽电化学腐蚀法在P型单晶硅表面制备了大孔硅。然后通过直流对靶反应磁控溅射法在大孔硅表面淀积了纳米氧化钨薄膜。使用场发射扫描电子显微镜(FESEM)观察大孔硅和氧化钨/大孔硅样品的形貌。分别使用X射线衍射(XRD)图谱和X射线光电子能谱(XPS)分析氧化钨晶体结构和钨的化合价。在室温下测试大孔硅和氧化钨/大孔硅气敏传感器的气敏特性。结果表明:氧化钨/大孔硅气敏传感器表现出了P型半导体气敏传感器的气敏特性。它对1ppm的二氧化氮显示了良好的恢复特性和重复性。氧化钨/大孔硅气敏传感器的长期稳定性要好于大孔硅气敏传感器。氧化钨的添加提高了大孔硅气敏传感器对二氧化氮的灵敏度。氧化钨/大孔硅气敏传感器对于二氧化氮的灵敏度要高于其对氨气和乙醇的灵敏度。通过淀积纳米氧化钨薄膜,改善了大孔硅对二氧化氮的选择性。 相似文献
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We prepared macro-porous silicon(MPS) by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon.Then,nano-WO3 films were deposited on MPS layers by DC facing target reactive magnetron sputtering.The morphologies of the MPS and WO3/MPS samples were investigated by using a field emission scanning electron microscope.The crystallization of WO3 and the valence of the W in the WO3/MPS sample were characterized by X-ray diffraction and X-ray photoelectron spectroscopy,respectively. The gas sensing properties of MPS and WO3/MPS gas sensors were thoroughly measured at room temperature. It can be concluded that:the WO3/MPS gas sensor shows the gas sensing properties of a P-type semiconductor gas sensor.The WO3/MPS gas sensor exhibits good recovery characteristics and repeatability to 1 ppm NO2.The addition of WO3 can enhance the sensitivity of MPS to NO2.The long-term stability of a WO3/MPS gas sensor is better than that of an MPS gas sensor.The sensitivity of the WO3/MPS gas sensor to NO2 is higher than that to NH3 and C2H5OH.The selectivity of the MPS to NO2 is modified by deposited nano-WO3 film. 相似文献
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Synthesis and room-temperature NO_2 gas sensing properties of a WO_3 nanowires/porous silicon hybrid structure
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We report on the fabrication and performance of a room-temperature NO2 gas sensor based on a WO3 nanowires/porous silicon hybrid structure. The W18O49 nanowires are synthesized directly from a sputtered tungsten film on a porous silicon (PS) layer under heating in an argon atmosphere. After a carefully controlled annealing treatment, WO3 nanowires are obtained on the PS layer without losing the morphology. The morphology, phase structure, and crystallinity of the nanowires are investigated by using field emission scanning electron microscopy (FESEM), X-ray diffractometer (XRD), and high-resolution transmission electron microscopy (HRTEM). Comparative gas sensing results indicate that the sensor based on the WO3 nanowires exhibits a much higher sensitivity than that based on the PS and pure WO3 nanowires in detecting NO2 gas at room temperature. The mechanism of the WO3 nanowires/PS hybrid structure in the NO2 sensing is explained in detail. 相似文献
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