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Nowadays,TFT-LCD manufacturing has become a very complex process,in which many different products being manufactured with many different tools.The ability to predict the quality of product in such a high-mix system is critical to developing and maintaining a high yield.In this paper,a statistical method is proposed for building a virtual metrology model from a number of products using a high-mix manufacturing process.Stepwise regression is used to select key variables that really affect the quality of th... 相似文献
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随着集成电路(IC)的小型化和智能化的需求不断增加,集成电路的电子封装已成为一个新的研究热点。 3D IC利用硅通孔技术(TSV)满足了这一需求,利用深度反应离子蚀刻(DRIE)过程制造TSV也越来越成熟。然而,能够预测和控制硅蚀刻工艺参数对蚀刻质量的影响是DRIE过程的关键。本研究提出一种基于变量分析建立DRIE过孔深度虚拟测量(VM)模型方法。利用特征提取算法减少过程数据的维度,以便于后续模型辨识的需要。在VM模型的基础上,设计推论控制器,提高晶元的深孔质量。实际工业数据验证表明:该方法可以将误差减少到9*10(-4),大大的改善现有的DRIE工艺。 相似文献
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