离子色谱在元器件腐蚀失效分析中的应用研究

电子元器件在应用过程中经常出现污染腐蚀失效,查找引起失效的污染、腐蚀源是分析技术的关键。本工作通过几种不同类别电子产品失效分析案例,研究了离子色谱检测(IC)在板面残留、工艺辅料、产品包封料、环境异物中污染腐蚀源的检验和分析方法,并与传统的形貌观察、绝缘阻抗测试、EDS成分分析、红外光谱分析的结果进行综合对比和验证。明确了离子色谱检验方法在电子元器件腐蚀失效分析中的应用场景、取样方法和结果分析方法,为离子色谱在电子元器件腐蚀失效预防中的工程应用提供指导和借鉴。     

AlGaN/GaN异质结材料基于热氧化的湿法腐蚀方法

A novel wet etching method for AlGaN/GaN heterojunction structures is proposed using thermal oxidation f ollowed by wet etching in KOH solution.It is found that an AlGaN/GaN heterostructure after high temperature oxidation above 700℃could be etched off in a homothermal（70℃） KOH solution while the KOH solution had no etching effects on the region of the AlGaN/GaN heterostructure protected by a SiO₂ layer during the oxidation process.A groove structure with 150 nm step depth on an AlGaN/GaN heterostructure was formed after 8 h thermal oxidation at 900℃followed by 30 min treatment in 70℃KOH solution.As the oxidation time increases,the etching depth approaches saturation and the roughness of the etched surface becomes much better.The physical mechanism of this phenomenon is also discussed.     

一种基于质量规格书的物料管控方法

首先,对传统的物料管控方法进行了总结和分析;然后,提出一种基于质量规格书的物料管控方法;最后,给出了该方法中质量规格书的具体内容.该方法既保障了元器件的固有可靠性,又可以免去使用单位的来料检测实验,是一种简便、 有效的物料管控方法.