Temperature dependent interfacial and electrical characteristics during atomic layer deposition and annealing of HfO2 films in p-GaAs metal-oxide-semiconductor capacitors

We have investigated the temperature dependent interfacial and electrical characteristics of p-GaAs metal-oxide-semiconductor capacitors during atomic layer deposition(ALD) and annealing of HfO₂ using the tetrakis(ethylmethyl) amino hafnium precursor. The leakage current decreases with the increase of the ALD temperature and the lowest current is obtained at 300℃ as a result of the Frenkel-Poole conduction induced leakage current being greatly weakened by the reduction of interfacial oxides at the higher temperature. Post deposition annealing(PDA) at 500℃ after ALD at 300℃ leads to the lowest leakage current compared with other annealing temperatures. A pronounced reduction in As oxides during PDA at 500℃ has been observed using X-ray photoelectron spectroscopy at the interface resulting in a proportional increase in Ga₂O₃. The increment of Ga₂O₃ after PDA depends on the amount of residual As oxides after ALD. Thus, the ALD temperature plays an important role in determining the high-k/GaAs interface condition. Meanwhile, an optimum PDA temperature is essential for obtaining good dielectric properties.     

MoS2/Si tunnel diodes based on comprehensive transfer technique

Due to the pristine interface of the 2D/3D face-tunneling heterostructure with an ultra-sharp doping profile, the 2D/3D tunneling field-effect transistor (TFET) is considered as one of the most promising low-power devices that can simultaneously obtain low off-state current (I_OFF), high on-state current (I_ON) and steep subthreshold swing (SS). As a key element for the 2D/3D TFET, the intensive exploration of the tunnel diode based on the 2D/3D heterostructure is in urgent need. The transfer technique composed of the exfoliation and the release process is currently the most common approach to fabricating the 2D/3D heterostructures. However, the well-established transfer technique of the 2D materials is still unavailable. Only a small part of the irregular films can usually be obtained by mechanical exfoliation, while the choice of the chemical exfoliation may lead to the contamination of the 2D material films by the ions in the chemical etchants. Moreover, the deformation of the 2D material in the transfer process due to its soft nature also leads to the nonuniformity of the transferred film, which is one of the main reasons for the presence of the wrinkles and the stacks in the transferred film. Thus, the large-scale fabrication of the high-quality 2D/3D tunnel diodes is limited. In this article, a comprehensive transfer technique that can mend up the shortages mentioned above with the aid of the water and the thermal release tape (TRT) is proposed. Based on the method we proposed, the MoS₂/Si tunnel diode is experimentally demonstrated and the transferred monolayer MoS₂ film with the relatively high crystal quality is confirmed by atomic force microscopy (AFM), scanning electron microscopy (SEM), and Raman characterizations. Besides, the prominent negative differential resistance (NDR) effect is observed at room temperature, which verifies the relatively high quality of the MoS₂/Si heterojunction. The bilayer MoS₂/Si tunnel diode is also experimentally fabricated by repeating the transfer process we proposed, followed by the specific analysis of the electrical characteristics. This study shows the advantages of the transfer technique we proposed and indicates the great application foreground of the fabricated 2D/3D heterostructure for ultralow-power tunneling devices.     

新型锗源环栅线隧穿晶体管结构设计及优化北大核心

设计了一种锗源环栅线隧穿晶体管(GAA-LTFET),并采用TCAD工具对其工作原理进行了分析,通过双栅功函数技术抑制寄生点隧穿机制,消除了转移电流曲线上的驼峰现象,提高器件特性。此外,还针对源区掺杂浓度和沟道厚度等关键参数进行了分析和优化,最终器件平均亚阈值摆幅可达33.4 mV/dec,开态电流可达0.64μA/μm,开关比值约为9×10^(8),该器件的优异特性有望促进后摩尔时代超低功耗技术的发展。     

PVA/明胶双网络热电水凝胶制备及自驱动呼吸监测应用

呼吸监测对于人体健康监测具有重要意义。人在呼吸过程中鼻腔呼出的气体温度明显高于环境温度,因此利用热电水凝胶的温度敏感特性研究了一种基于热电水凝胶的自驱动人体呼吸监测装置。通过在聚乙烯醇(PVA)/明胶双网络水凝胶中引入I^-和I^-₃氧化还原电对,将人体呼吸过程产生的温差信号转化成电信号,且塞贝克系数可以达到0.71 mV/K。通过对该热电水凝胶力学性能和电学性能的测试和分析,证明了其不仅具有良好的柔性、可拉伸性,而且能够用于人体呼吸状态监测,及时发现人体呼吸异常情况。该研究可为基于水凝胶的可穿戴电子设备的应用研究提供理论参考和技术支持。     

Efficient thermal analysis method for large scale compound semiconductor integrated circuits based on heterojunction bipolar transistor

In this paper, an efficient thermal analysis method is presented for large scale compound semiconductor integrated circuits based on a heterojunction bipolar transistor with considering the change of thermal conductivity with temperature.The influence caused by the thermal conductivity can be equivalent to the increment of the local temperature surrounding the individual device. The junction temperature for each device can be efficiently calculated by the combination of the semianalytic temperature distribution function and the iteration of local temperature with high accuracy, providing a temperature distribution for a full chip. Applying this method to the InP frequency divider chip and the GaAs analog to digital converter chip, the computational results well agree with the results from the simulator COMSOL and the infrared thermal imager respectively. The proposed method can also be applied to thermal analysis in various kinds of semiconductor integrated circuits.