单粒子翻转二维成像技术

为了给星用半导体器件不同区域的单粒子翻转(SEU)机理研究提供一种高效、可靠手段,基于北京HI-13串列加速器,从重离子微束辐照技术和存储器单粒子效应检测技术这2方面,对微电子器件SEU二维成像测试技术进行了研究,建立了基于虚拟技术的测试系统。利用该成像技术,对国产2 kbit静态随机存储器(SRAM)的SEU敏感区域进行了实验研究,结果与理论结果及以往手动测试实验结果一致。     

半导体器件内离子有效LET值测量方法研究

提出了一种基于电荷收集测试技术的离子有效LET值测量方法.首先对半导体器件内收集电荷量与入射离子有效LET值之间的关系进行了分析,根据二者之间的关系提出通过测量电荷收集量从而测量离子有效LET值的方法;然后建立了半导体器件电荷收集测试系统,利用PN结和SRAM对测量方法进行了验证;最后成功利用该方法解释了以往单粒子效应实验中出现的数据异常.     

Experimental research of heavy ion and proton induced single event effects for a Bi-CMOS technology DC/DC converter

This paper tested and analyzed heavy ion and proton induced single event effects (SEE) of a commercial DC/DC converter based on a 600 nm Bi-CMOS technology. Heavy ion induced single event transients (SET) testing has been carried out by using the Beijing HI-13 tandem accelerator at China Institute of Atomic Energy. Proton test has been carried out by using the Canadian TRIUMF proton accelerator. Both SET cross section versus linear energy transfer (LET) and proton energy has been measured. The main study conclusions are: (1) the DC/DC is both sensitive to heavy ion and proton radiations although at a pretty large feature size (600 nm), and threshold LET is about 0.06 MeV·mg/cm²; (2) heavy ion SET saturation cross section is about 5 magnitudes order larger than proton SET saturation cross section, which is consistent with the theory calculation result deduced by the RPP model and the proton nuclear reaction model; (3) on-orbit soft error rate (SER) prediction showed, on GEO orbit, proton induced SERs calculated by the heavy ion derived model are 4-5 times larger than those calculated by proton test data.     

北京HI-13串列加速器上单粒子效应辐射装置简介

在北京HI-13串列加速器上建立了微电子器件单粒子效应地面模拟辐照试验装置. 利用Q3D磁谱仪的高分辨特性和散焦特性, 获得了强度均匀分布、注量率可调的单能重离子束流, 开展了大量星用器件抗单粒子效应性能评估试验研究. 为了深入研究单粒子效应机制, 采用针孔准直技术, 建立了重离子微束单粒子效应辐射装置, 获得了最小束点尺度为2.3μm×3.5μm的重离子微束.     

HI-13串列加速器生物用新终端7Li离子束流监测诊断研究

7Li离子属于高LET辐射,是辐射生物学基础研究中常用的重离子射线之一,它是硼中子俘获治疗癌症中起关键作用的离子,在辐射诱变育种等领域也有较好的应用前景。实验在北京HI-13串列加速器R20支线生物用新终端上进行,对43 MeV 7Li离子束斑大小、均匀性和监测注量的准确性进行测量和评估,结果表明:均匀性好于90%的最大束斑面积为5.0cm×5.0cm;4.2×104 ～1.5×105 particles/cm2/s注量率范围内,两种不同探测器测得的注量率变化呈线性关系,闪烁体探测器监测的注量与CR39探测器测得的绝对注量的误差小于10%。这些束流特性能够满足辐射生物学实验要求,有利于进一步开展与硼中子俘获治疗癌症或辐射诱变育种中7Li离子的辐射生物学相关研究。7Li ion with high linear energy transfer (LET) radiation has been used in radiobiological research, takes main effect in Boron Neutron Capture Therapy and is applied in radiation mutagenic breeding. This experiment was carried on the new terminal established for radiobiological application, located at the end of R20 branch beam line of HI-13 tandem accelerator. The beam qualities of 7Li ions of 43MeV generated by HI-13 tandem accelerator, including spot size and uniformity and particle fluence accuracy were measured using different detection methods. The results showed that beam uniformity was over 90% at 5cm×5cm area, the flux of S1 and M3 had a good linear relationship as particle flux ranged from 4.2×104 particles/cm2/s to 1.5×105 particles/cm2/s, and particle fluence accuracy was better than 90%. All the results showed that the beam qualities of 7Li ions finely met the basic requirements for radiation biological experiment. It provides important method to study biological effects for fundamental research and tumor therapy or radiation mutagenic breeding application associated with 7Li ions.     

一种实验确定微电子器件灵敏体积的方法

介绍一种实验确定微电子器件单粒子翻转(SEU)灵敏体积(S_V)厚度d的方法.用从低到高不同能量的重离子辐照微电子器件, 测量其SEU截面随离子射程的变化曲线σ_seu(r), 用数学计算从σ_seu(r)和LET(r)函数提取d. 利用测得的d和σ_seu(LET), 经过模型计算可得到更精确的空间SEU率的预言值.