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Displacement measurements and position sensing have been playing an important role in many fields such as fabrication, biophysics, and autocontrol. Interferome- try, laser triangulation, optical fiber sensing and moiré technique are common optical measuring methods[1-3]. Among these methods, moiré technique holds the most interest due to its high accuracy, large range, low cost, and other advantages. When a long working distance is required, or when space is not at a premium, a moiré sys- t… 相似文献
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基于方解石晶体的光学特性和传统Wollaston棱镜的结构特点,设计了一种新型Wollaston式多光束分束棱镜。棱镜的两块晶体的光轴不再是垂直的,而是呈现一定的角度。通过结合玻璃棱镜,可以实现三束或四束光束平行光束的出射。以晶体光轴夹角为45°角为例,对该棱镜进行了讨论研究。研究得出:当一束自然单色光入射时,当入射光束的光斑大小大于两平行光束之间的距离时,可以实现两束相互垂直的偏振光和一束自然光出射,当光斑大小小于棱镜中两平行光束之间的距离时,能够产生四束分开程度可调并且平行出射的偏振光。该棱镜能为不同的应用环境提供可调节的偏振出射光束,从而节约成本。 相似文献
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A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from Sight intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given. 相似文献
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提高光学相干层析成像纵向分辨率的方法 总被引:2,自引:1,他引:1
光学相干层析成像技术是一种新型的成像技术,能实现对活体生物组织(透明和不透明)非接触、无伤害、高分辨率的体内断面成像。光学相干层析成像利用相干门技术,其纵向分辨率取决于光源的相干长度,要进一步提高它的纵向分辨率必须从光源入手,本文对采用不同光源提高光学相干层析成像纵向分辨率的方法进行了详细的讨论。 相似文献
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A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given. 相似文献
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Position sensor based on slit imaging 总被引:2,自引:0,他引:2
A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on a bi-cell detector. The position of the imaging slit is obtained by detecting light intensity on two parts of the hi-cell detector. In experiments, the feasibility of the sensor was verified. The repeatability was less than 40 nm. 相似文献
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提出了一种基于狭缝投影的位置传感技术,阐述了此技术的传感原理及其在精密定位中的应用。准直激光束照明的投影狭缝由一个透镜以掠入射角度投影在被测物体上,狭缝投影经过被测物体表面的反射和另一个透镜的成像在探测双缝上形成投影狭缝像。探测双缝放大成像在双像限探测器上,投影狭缝像透过探测双缝的光强分别被双像限探测器的两个像限所接收,通过检测双像限探测器两个像限上的光强获得被测物体的位置。实验验证了此传感技术的可行性,其位置重复测量偏差小于32nm(1σ)。 相似文献