变In组分沟道的MM-HEMT材料电子输运特性研究

在变缓冲层高迁移率晶体管（MM_HEMT）器件中，二维电子气的输运性质对器件性能起着决定作用.通过低温下二维电子气横向电阻的量子振荡现象，结合变温度的Hall测量，系统研究了不同In组分沟道MM_HEMT器件中子带电子迁移率和浓度随温度的变化关系.结果表明，沟道中In组分为0.65的样品，材料电学性能最好，In组分高于0.65的样品，严重的晶格失配将产生位错，引起迁移率下降，大大影响材料和器件的性能. 关键词： 变缓冲层高迁移率晶体管 Shubnikov_de Hass 振荡     

分子束外延低温生长GaAs缓冲层及性能研究

用国产分子束外延设备(Ⅳ型),在低温(200—300℃)下生长了GaAs,AlGaAs和GaAs-AlGAs超晶格。本文着重提出对在低温生长GaAs缓冲层上生长优质GaAs有源层,尤其对缺陷和杂质很敏感的高电子迁移率晶体管结构材料进行研究。     

Influence of spacer layer thickness on the current-voltage characteristics of pseudomorphic AlAs/In0.53Ga0.47As/InAs resonant tunnelling diodes

This paper investigates the dependence of current voltage characteristics of AlAs/In0.53Ga0.47As/InAs resonant tunnelling diodes （RTDs） on spacer layer thickness. It finds that the peak and the valley current density J in the negative differential resistance （NDR） region depends strongly on the thickness of the spacer layer. The measured peak to valley current ratio of RTDs studied here is shown to improve while the current density through RTDs decreases with increasing spacer layer thickness below a critical value.     

升华法生长AlN体单晶初探

研究了高温升华法(PVT)生长AlN体单晶的技术和材料的性质.使用陶瓷BN坩埚,加热温度约在1900℃左右,生长结果为AlN晶须或致密多晶,难以生长出较大的AlN晶粒.用钨坩埚加热生长温度达到2200℃左右时,在AlN陶瓷片和6H-SiC片上生长了直径22mm的AlN晶体,最大的晶粒尺寸长10mm、直径5mm.利用X射线粉末衍射分析了几种不同AlN样品的结构和组成.讨论了PVT法生长AlN晶体所涉及的化学热力学过程和现象.     

LCD-TV用直下式LED背光源的光学设计

三基色LED背光源是成就高品质液晶显示器的关键技术之一,其色域是传统CCFL背光源的150%以上。其中直下式背光源具有结构简单、光利用率高的特点,是目前大尺寸液晶显示背光源的首选,但是由于没有导光板,直下式背光源的光均匀性变得较差。通过对LED光场分布的模拟和分析,得出了一种新型LED光场分布设计,对由此光场分布的三基色LED组成的66cm(26in)背光源模拟表明,该背光源在未加扩散膜前,灯箱厚度为20～28mm时,亮度均匀度大于83%,ΔU′V′值在0.01左右;加上扩散膜之后,灯箱厚度为20mm时,均匀度可达到89.58%,ΔU′V′值达到0.0041。     

Organic Light Emitting Diodes with an Organic Acceptor/Donor Interface Involved in Hole Injection

Organic light emitting diodes with an interface of organic acceptor 3-, 4-, 9-,10-perylenetetracarboxylic dianhydride （PTCDA） and donor copper phthalocyanine （CuPc） involved in hole injection are fabricated. As compared to the conventional device using a 5 nm CuPc hole injection layer, the device using an interface of 10nm PTCDA and 5 nm CuPc layers shows much lower operating voltage with an increase of about 46% in the maximum power efficiency. The enhanced device performance is attributed to the efficient hole generation at the PTCDA/CuPc interface. This study provides a new way of designing hole injection.     

Growth and Characterization of A1GaN/A1N/GaN HEMT Structures with a Compositionally Step-Graded A1GaN Barrier Layer

A new A1GaN/A1N/GaN high electron mobility transistor （HEMT） structure using a compositionally step-graded A1GaN barrier layer is grown on sapphire by metalorganic chemical vapour deposition （MOCVD）. The structure demonstrates significant enhancement of two-dimensional electron gas （2DEG） mobility and smooth surface morphology compared with the conventional HEMT structure with high A1 composition A1GaN barrier. The high 2DEG mobility of 1806 cm2/Vs at room temperature and low rms surface roughness of 0.220 nm for a scan area of 5μm×5 μm are attributed to the improvement of interracial and crystal quality by employing the stepgraded barrier to accommodate the large lattice mismatch stress. The 2DEG sheet density is independent of the measurement temperature, showing the excellent 2DEG confinement of the step-graded structure. A low average sheet resistance of 314.5Ω/square, with a good resistance uniformity of 0.68%, is also obtained across the 50 mm epilayer wafer. HEMT devices are successfully fabricated using this material structure, which exhibits a maximum extrinsic transconductance of 218 mS/ram and a maximum drain current density of 800 mA/mm.     

高性能InGaAs/AlAs共振隧穿二极管的研制与器件模拟分析

在半绝缘的InP衬底上采用分子束外延的方法生长制备了不同势垒厚度的RTD材料样品,室温下测量的最高峰-谷电流比为18.39.通过模拟得到RTD直流特性与势垒厚度、势阱材料及厚度、隔离层厚度以及掺杂浓度间的关系,对结果进行了分析与讨论.     

硅基3C-SiC的热氧化机理

采用低压化学气相沉积(LPCVD)方法在Si(100)衬底上外延生长3C-SiC.利用干氧氧化方法对生长的SiC层进行了热氧化,氧化温度为1050℃.采用X射线光电子能谱仪(XPS),结合Ar+溅射技术,在不同的溅射时间下,对氧化生长的SiO2层及SiO2/SiC界面层的化学键和组成成分进行了深度谱分析,在此基础上提出了热氧化模型,探讨了3C-SiC的热氧化机理.     

Si衬底上SiC薄膜的快速生长

用垂直式低压化学气相沉积(LPCVD)系统,在(111)和(100)Si衬底上快速外延生长了SiC.用Nomarski光学显微镜和X射线衍射(XRD)分析了SiC外延膜.探讨了生长速度与反应气体流量的关系,HCl在反应过程中的作用机理,以及在快速生长条件下外延膜的结晶和取向关系.