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A lateral double-diffused metal-oxide-semiconductor field effect transistor (LDMOST) with multiple n-regions in the p-substrate is investigated in detail. Because of the decrescent n-regions, the electric field distribu- tion is higher and more uniform, and the breakdown voltage of the new structure is increased by 95%, in comparison with that of a conventional counterpart without substrate n-regions. Based on the trade-off between the breakdown voltage and the on-resistance, the optimal number of n-regions and the other key parameters are achieved. Furthermore, sensitivity research shows that the breakdown voltage is relatively sensitive to the drift region doping and the n-regions' lengths. 相似文献
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提出了一种阶梯掺杂P柱区二维类超结LDMOS结构。漂移区采用P/N柱交替掺杂的方式形成纵向类超结。漂移区的P柱采用掺杂浓度从源端到漏端逐渐变低的变掺杂结构。这种变掺杂P柱区的引入对衬底辅助耗尽效应所带来的电荷不平衡问题进行了调制,使得漂移区可以充分耗尽,提高了耐压。P区变掺杂可以提高N区浓度,降低了导通电阻。与常规二维类超结LDMOS结构相比,击穿电压提高了30%,导通电阻下降了10.5%,FOM提升了87.6%,实现了击穿电压与导通电阻的良好折中。 相似文献
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为了解决浮空P区IGBT器件在小电流开启时存在较大EMI噪声的问题,提出了一种低阻空穴路径结构的IGBT。新结构在浮空P区中引入P+层以形成高低结,在开启过程中,较低电势的P+层加强了浮空P区空穴沿空穴路径地流出,呈现出低阻空穴路径,从而降低位移电流对栅极地充电,使得器件有较低的EMI噪声。仿真结果表明,在相同的开启功耗下,该结构相对于普通空穴路径的IGBT结构,能够明显降低器件的d IC/dt的最大值,抑制了器件的EMI噪声。 相似文献
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