A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting

A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based frame and composite cantilever. The prototype tested at resonant vibration generates 1.15μW of effective power to a 20.4-kΩ resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.     

正面腐蚀方法制作新型微机械红外热堆探测器

阐述了微机械制造工艺制作红外热堆探测器的方法,其采用新的正面湿法腐蚀的方法释放体硅,获得悬梁结构的红外热堆探测器。该探测器用LPCVD（低压化学气相沉积）氮化硅膜,与热氧化得到的氧化硅膜形成三明治结构作为热偶对的支撑结构;热偶材料采用多晶硅与金属。实验结果表明这是一种很有前景的制作方法。