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以 PECVD为制备工艺 ,a-Si O2 ∶ H/a-Si∶ H为布拉格反射镜多层膜 ,a-Si Cx∶ H为中间腔体发光材料 ,制备垂直腔面的发光微腔。文章通过模拟确定了微腔的多层膜层数和排列顺序 ,并对微腔的发光特性进行了反射谱和荧光谱研究。结果表明 ,该微腔性能良好 ,能激射出半高宽为 9nm、波长为 743 nm的荧光峰 ,与设计值70 0 nm基本吻合。 相似文献
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以 PECVD 为制备工艺 a-SiO2 = H/ a-Si= H 为分布式布拉格反射镜的多层膜 a-SiC:= H 为中间腔体发光材
料 制备出垂直腔面的发光微腔. 根据模拟结果确定了微腔的多层膜层数和排列顺序 并在 250C 下制备出了这种
微腔. 将微腔样品分别在不同温度下进行退火 对退火前后的微腔进行了反射谱和光致发光谱研究. 结果表明 微
腔能激射出波长为 743nm 半高宽为 9nm 的光 在 350C 退火后发光性能进一步提高 而 450C 退火后 性能恶化. 相似文献
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A Si-based novel Fabry-Perot microcavity device that can emit blue-green light at room temperature is proposed and fabricated, One of its Bragg reflectors consists of periodically stacked a-SiO2/a-Si:H layers deposited on the glass by plasma enhanced chemical vapour deposition, The other reflector is a sputtered Al film, The active region between both the reflectors is constructed by a p-type a-SiCx:H/intrinsic-type a-SiCx :H junction fromwhich the electroluminescence (EL) is originated. The EL spectra of this device are recorded by RENISHAW RM2000, a sharp and strong EL peak at 483nm with FWHM of 20nm is observed when the device is driven by dc voltages of 8 V, 12 V and 18 V at room temperature. The intensity of EL increases with the applied voltage while the luminescence wavelength keeps unchanged. Compared with the EL spectra from the sample without the Bragg reflector, the luminescence intensity is about 10 times enhanced and the peak is narrowed greatly. The luminescence mechanism is analysed in detail. 相似文献
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以PECVD为制备工艺,a-SiO2;H/a-Si:H为布拉格反射镜多层膜,a-SiCx:H为中间腔体发光材料,制备垂直腔面的发光微腔。文章通过模拟确定了微腔的多层膜层数和排列顺序,并对微腔的发光特性进行了反射谱和荧光谱研究。结果表明,该微腔性能良好,能激射出半高宽为9nm、波长为743nm的荧光峰,与设计值700nm基本吻合。 相似文献
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