利用Ni纳米岛模板制备半极性晶面GaN纳米柱

报道了在GaN表面以Ni纳米岛结构作为模板,利用电感耦合等离子(ICP)刻蚀制备GaN纳米柱的研究结果。原子力显微镜(AFM)测试结果表明,金属Ni薄膜在快速热退火(RTA)作用下形成了平均直径和高度大约分别为325 nm和70 nm的纳米岛状结构。通过电子扫描显微镜(SEM)照片看出,以GaN表面所形成的Ni纳米岛作为模板图形,通过控制ICP刻蚀时间,在一定的刻蚀时间内(2 min)获得有序的并拥有半极性晶面的GaN纳米柱阵列。这种新颖的半极性GaN纳米柱作为氮化物量子阱或者超晶格结构的生长模板,可以有效减小甚至消除极化效应,提高光电子器件的效率和性能。     

预非晶化硅中注入硼的异常扩散

预非晶化硅中,在非晶区和损伤区之间有一重损伤层存在,其边缘清楚,厚度约为20nm,包含有大量的扩展缺陷。它阻挡了尾部损伤区内簇团分解放出的硅间隙原子向非晶区扩散,大大削弱了非晶区内注入硼的异常扩散。选用条件适当的二次硅离子注入,使重损伤层加重加厚,从而完全阻止了非晶层内硼的异常扩散。本文在实验上为重损伤层阻止非晶区内硼异常扩散的模型提供证明。     

Growth and properties of wide spectral white light emitting diodes

Wide spectral white light emitting diodes have been designed and grown on a sapphire substrate by using a metal-organic chemical vapor deposition system. Three quantum wells with blue-light-emitting, green-light-emitting and red-light-emitting structures were grown according to the design. The surface morphology of the film was observed by using atomic force microscopy. The films were characterized by their photoluminescence measurements. X-ray diffraction θ/2θ scan spectroscopy was carried out on the multi-quantum wells. The secondary fringes of the symmetric ω/2θ X-ray diffraction scan peaks indicate that the thicknesses and the alloy compositions of the individual quantum wells are repeatable throughout the active region. The room temperature photoluminescence spectra of the structures indicate that the white light emission of the multi-quantum wells is obtained. The light spectrum covers 400-700 nm, which is almost the whole visible light spectrum.     

石墨烯上生长GaN纳米线的研究

在常压条件下采用化学气相淀积(CVD)技术在有石墨烯插入层的衬底上生长GaN纳米线,研究了生长温度、石墨烯插入层、催化剂等因素对GaN纳米线的形貌、光学特性以及结构的影响.通过扫描电子显微镜(SEM)、光致发光(PL)谱、拉曼(Raman)谱和透射电子显微镜(TEM)等表征手段对GaN纳米线的形貌、光学特性以及结构进行表征.结果表明,在1 100℃条件下,同时有石墨烯插层和催化剂的衬底表面能够获得低应力单晶GaN纳米线.石墨烯、催化剂对于获得低应力单晶GaN纳米线有重要的作用.     

γ-LiAlO2衬底上m面GaN薄膜的各向异性的测试和分析

A 0.09 mm m-plane GaN film is deposited via hydride vapor phase epitaxy （HVPE） on a γ-LiAlO2 substrate. To research the anisotropy between directions with different angles with the c-axis in the m plane, photoluminescence （PL） measurements were carried out. The results show that the electronic transition was influenced by the electric field along the c-axis, which results in an obvious anisotropy, but the influence was weakened by the hexagonal symmetry along the c-axis.     

Synthesis and Growth Mechanism： A Novel Fishing Rod-Shaped GaN Nanorods

A novel fishing rod-shaped GaN nanorod is successfully fabricated through a new method by using the two-step growth technology. This growth method is applicable to continuous synthesis and is able to produce a large number of single-crystalline GaN nanorods with a relatively high purity and at a low cost. X-ray diffraction, scanning electron microscopy and high-resolution transmission electron microscopy are used to characterize the as- synthesized nanorods. The results show that most of the nanorods consist of a main rod and a top curved thread. It is single-crystal GaN with hexagonal wurtzite structure. The representative photoluminescence spectrum at room temperature exhibits a strong UV light emission band centered at 370.8nm. Furthermore, a possible two-stage growth mechanism of the fishing rod-shaped GaN nanorod is also briefly discussed.     

镍纳米岛模板制备氮化镓纳米柱研究

Uniform GaN nanopillar arrays have been successfully fabricated by inductively coupled plasma etching using self-organized nickel nano-islands as the masks on GaN/sapphire. GaN nanopillars with diameters of 350 nm and densities of 2.6 × 10^8 cm^-2 were demonstrated and controlled by the thickness of Ni film and the NH3 annealing time. These GaN nanopillars show improved optical properties and strain change compared to that of GaN film before ICP etching. Such structures with large-area uniformity and high density could provide additional advantages for light emission of light-emitting diodes, quality improvement of ELO regrowth, etc.     

杂质对离子注入射程端缺陷的影响

本文研究了注入杂质对预非晶化硅的射程端缺陷的影响.提出:在固相外延时,来自非晶层内的空位与来自射程端的硅间隙原子形成相向扩散流.注入的杂质可以俘获点缺陷,从而影响了点缺陷的相向扩散流,P促进射程末端缺陷的分解,而B促进其聚结.     

GaN自支撑衬底的化学机械抛光研究

Chemical mechanical polishing （CMP） has been used to produce smooth and scratch-free surfaces for GaN. In the aqueous solution of KOH, GaN is subjected to etching. At the same time, all surface irregularities, including etch pyramids, roughness after mechanical polishing and so on will be removed by a polishing pad. The experiments had been performed under the condition of different abrasive particle sizes of the polishing pad. Also the polishing results for different polishing times are analyzed, and chemical mechanical polishing resulted in an average root mean square （RMS） surface roughness of 0.565 nm, as measured by atomic force microscopy.