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The influence and explanation of fringing-induced barrier lowering on sub-100 nm MOSFETs with high-k gate dielectrics 下载免费PDF全文
The fringing-induced barrier lowering(FIBL) effect of sub-100 nm MOSFETs with high-k gate dielectrics is investigated using a two-dimensional device simulator.An equivalent capacitance theory is proposed to explain the physics mechanism of the FIBL effect.The FIBL effect is enhanced and the short channel performance is degraded with increasing capacitance.Based on equivalent capacitance theory,the influences of channel length,junction depth,gate/lightly doped drain(LDD) overlap length,spacer material and spacer width on FIBL is thoroughly investigated.A stack gate dielectric is presented to suppress the FIBL effect. 相似文献
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A threshold voltage analytical model for high-k gate dielectric MOSFETs with fully overlapped lightly doped drain structures 下载免费PDF全文
We investigate the influence of voltage drop across the lightly doped drain(LDD) region and the built-in potential on MOSFETs,and develop a threshold voltage model for high-k gate dielectric MOSFETs with fully overlapped LDD structures by solving the two-dimensional Poisson’s equation in the silicon and gate dielectric layers.The model can predict the fringing-induced barrier lowering effect and the short channel effect.It is also valid for non-LDD MOSFETs.Based on this model,the relationship between threshold voltage roll-off and three parameters,channel length,drain voltage and gate dielectric permittivity,is investigated.Compared with the non-LDD MOSFET,the LDD MOSFET depends slightly on channel length,drain voltage,and gate dielectric permittivity.The model is verified at the end of the paper. 相似文献
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推导了超薄体双栅肖特基势垒MOSFET器件的漏电流模型,模型中考虑了势垒高度变化和载流子束缚效应.利用三角势垒近似求解薛定谔方程,得到的载流子密度和空间电荷密度一起用来得到量子束缚效应.由于量子束缚效应的存在,第一个子带高于导带底,这等效于禁带变宽.因此源漏端的势垒高度提高,载流子密度降低,漏电流降低.以前的模型仅考虑由于镜像力导致的肖特基势垒降低,因而不能准确表示漏电流.包含量子束缚效应的漏电流模型克服了这些缺陷.结果表明,较小的非负肖特基势垒,甚至零势垒高度,也存在隧穿电流.二维器件模拟器Silvaco得到的结果和模型结果吻合得很好. 相似文献
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Valence band structure and density of states effective mass model of biaxial tensile strained silicon based on k·p theory 下载免费PDF全文
After constructing a stress and strain model, the valence bands of in-plane biaxial tensile strained Si is calculated by k·p method. In the paper we calculate the accurate anisotropy valance bands and the splitting energy between light and heavy hole bands. The results show that the valance bands are highly distorted, and the anisotropy is more obvious. To obtain the density of states (DOS) effective mass, which is a very important parameter for device modeling, a DOS effective mass model of biaxial tensile strained Si is constructed based on the valance band calculation. This model can be directly used in the device model of metal-oxide semiconductor field effect transistor (MOSFET). It also a provides valuable reference for biaxial tensile strained silicon MOSFET design. 相似文献
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推导了超薄体双栅肖特基势垒MOSFET器件的漏电流模型,模型中考虑了势垒高度变化和载流子束缚效应.利用三角势垒近似求解薛定谔方程,得到的载流子密度和空间电荷密度一起用来得到量子束缚效应.由于量子束缚效应的存在,第一个子带高于导带底,这等效于禁带变宽.因此源漏端的势垒高度提高,载流子密度降低,漏电流降低.以前的模型仅考虑由于镜像力导致的肖特基势垒降低,因而不能准确表示漏电流.包含量子束缚效应的漏电流模型克服了这些缺陷.结果表明,较小的非负肖特基势垒,甚至零势垒高度,也存在隧穿电流.二维器件模拟器Silvaco得到的结果和模型结果吻合得很好. 相似文献
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