湿法腐蚀和干法刻蚀工艺对850 nmVCSEL高速调制性能的影响

垂直腔面发射激光器(VCSEL)以其低功耗、低阈值电流、高调制速率和易制作二维阵列器件等特点,广泛应用于短距离光互连领域.湿法腐蚀和干法刻蚀作为高速VCSEL台面结构制备的两种工艺,影响VCSEL氧化层的大小.文章研究了氧化层面积对寄生电容的影响,并计算得到7 μm氧化孔径下采用干法刻蚀工艺的垂直腔面发射激光器,相比较湿法腐蚀工艺,氧化层电容由902.23 fF减小至581.32 fF,谐振腔电容由320.72 fF减小至206.65 fF.通过对采用湿法腐蚀和干法刻蚀工艺制备的GaAs量子阱结构高速VCSEL进行小信号调制响应测试,结果表明,7μm氧化孔径下干法刻蚀VCSEL小信号调制带宽提高至16.1 GHz.     

采用BCB平整技术的高速850 nm垂直面发射激光器

垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯（BCB）平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7 μm氧化孔径下3 dB小信号调制带宽可达15.2 GHz。     

采用BCB平整技术的高速850nm垂直面发射激光器（英文）

垂直腔面发射激光器因其具有低阈值、低功耗、可实现高速调制等优势,广泛地应用于光通信和光互连等领域。寄生电容是影响激光器的调制带宽的主要因素之一。本文通过采用低k值的苯并环丁烯(BCB)平整技术有效地降低了垂直腔面发射激光器的寄生电容。详细研究了BCB平整技术的最优工艺参数,为未来高速垂直腔面发射激光器的制造技术提供参考。低k值BCB平整垂直腔面发射激光器在7μm氧化孔径下3 d B小信号调制带宽可达15.2 GHz。     

Scalability of dark current in silicon PIN photodiode

The mechanism for electrical conduction is investigated by the dark temperature-dependent current–voltage characteristics of Si PIN photodiodes with different photosensitive areas.The characteristic tunneling energy E_(00) can be obtained to be 1.40 me V,1.53 me V,1.74 me V,1.87 me V,and 2.01 me V,respectively,for the photodiodes with L = 0.25 mm,0.5 mm,1 mm,1.5 mm,and 2 mm by fitting the ideality factor n versus temperature curves according to the tunneling-enhanced recombination mechanism.The trap-assisted tunneling-enhanced recombination in the i-layer plays an important role in our device,which is consistent with the experimental result that area-dependent leakage current is dominant with the side length larger than 1 mm of the photosensitive area.Our results reveal that the quality of the bulk material plays an important role in the electrical conduction mechanism of the devices with the side length larger than 1 mm of the photosensitive area.     

Underwater Bessel-like beams with enlarged depth of focus based on fiber microaxicon

Underwater optical wireless communication, which is useful for oceanography, environmental monitoring, and underwater surveillance, suffers the limit of the absorption attenuation and Mie–Rayleigh scattering of the lights. Here, Bessel-like beams generated by a fiber microaxicon is utilized for underwater wireless propagation. Underwater, the cone angle for generating Bessel-like beams starts from 46°, which is smaller than that in air for Bessel-like beams. When the cone angle of the fiber micr...     

Si基PIN光电探测器电场隔离结构对暗电流的影响

对Si基PIN光电探测器的电场隔离结构进行了研究,讨论了电场隔离结构的作用以及其与暗电流的关系,并进行了仿真模拟与测试分析.电场隔离结构主要将有源区和边缘隔离从而降低暗电流,结合仿真模拟结果和实验测试结果,分析得到电场隔离结构主要降低与周长有关的暗电流,对于小尺寸器件作用更明显.     

光纤光栅外腔半导体激光器的多参量优化分析

采用多参量优化的多目标遗传算法优化了光纤光栅外腔半导体激光器（FGECL）管芯的两个端面反射率和外腔长度.研究了FGECL的阈值特性,并对多个参量优化和单个参量优化的结果进行了比较分析.表明获取最低阈值电流,要以激光器的电光转换效率和输出光功率为代价,从而得到高边模抑制比、窄光谱线宽、良好动态特性和高调制速率的FGECL.并且发现当两端面的反射率增加,同时激射波长在外腔长度中形成稳定谐振时,激光器的阈值电流达到最小值,但相应的电光转换效率和出光功率会急剧地减小.     

Efficiency-enhanced AlGaInP light-emitting diodes using transparent plasmonic silver nanowires

Silver nanowire(AgNW) networks have been demonstrated to exhibit superior transparent and conductive performance over that of indium-doped tin oxide(ITO) and have been proposed to replace ITO, which is currently widely used in optoelectronic devices despite the scarcity of indium on Earth. In this paper, the current spreading and enhanced transmittance induced by AgNWs, which are two important factors influencing the light output power, were analyzed. The enhanced transmittance was studied by finite-difference time-domain simulation and verified by cathodoluminescence measurements.The enhancement ratio of the light output power decreased as the Ga P layer thickness increased, with enhancement ratio values of 79%, 52%, and 15% for Ga P layer thicknesses of 0.5 μm, 1 μm, and 8 μm, respectively, when an AgNW network was included in Al Ga In P light-emitting diodes. This was because of the decreased current distribution tunability of the AgNW network with the increase of the Ga P layer thickness. The large enhancement of the light output power was caused by the AgNWs increasing carrier spread out of the electrode and the enhanced transmittance induced by the plasmonic AgNWs. Further decreasing the sheet resistance of AgNW networks could raise their light output power enhancement ratio.