SOI nanophotonic waveguide structures fabricated with deep UV lithography

To reduce the dimensions of photonic integrated circuits, high-contrast wavelength-scale structures are needed. We developed a fabrication process for Silicon-on-insulator nanophotonics, based on standard CMOS processing techniques with deep UV lithography. Measurements using either end-fire incoupling or grating-based fibre couplers show photonic crystal waveguides with moderate propagation losses (7.5 dB/mm) and photonic wires with very low propagation losses (0.24 dB/mm).     

Compact efficient broadband grating coupler for silicon-on-insulator waveguides

We have designed a high-efficiency broadband grating coupler for coupling between silicon-on-insulator (SOI) waveguides and optical fibers. The grating is only 13 microm long and 12 microm wide, and the size of the grooves is optimized numerically. For TE polarization the coupling loss to single-mode fiber is below 1 dB over a 35-nm wavelength range when using SOI with a two-pair bottom reflector. The tolerances to fabrication errors are also calculated.     

Out-of-plane scattering in 1-D photonic crystal slabs

We present a detailed study of out-of-plane scattering losses in a 1D approximation of 2D photonic crystal slabs. In 2D photonic crystals with a waveguide structure in the third dimension, the periodic structure (in a lot of applications a 2D arrangement of holes etched through the core and cladding) will cause light to scatter out of the waveguide plane. We studied the out-of-plane scattering losses of these holes using a 2D approximation of this 3D structure, with etched slots instead of holes. Our simulation techniques included mode expansion with PML and FDTD. We will present the influence of the refractive index contrast between core and cladding of the layered structure. We show that the losses increase with higher index contrast between core and cladding, but that with very high index contrasts and under the right circumstances light can be coupled into lossless Bloch modes.