Axial Distribution of the Ion Mass-to-Charge State in a Magnetron Discharge Plasma

Russian Physics Journal - The axial distribution of the ion mass-to-charge state in planar magnetron plasma has been studied. Copper is used as a target material, and argon was used as an operating...     

Modification of the Material Surface by Boron Ions Based on Vacuum Arc Discharge Systems and a Planar Magnetron

Russian Physics Journal - The principle of operation and the characteristics of the experimental equipment intended for the generation of boron ion plasma and beams are presented. The equipment...     

Physical Features of the Functioning of a Planar Magnetron Sputter with a Thermally Insulated,Discharge-Heated Target for Boron Coating Deposition

Russian Physics Journal - The design, the principle of operation, and the characteristics of a planar magnetron sputter for pure boron coatings are presented. A feature of this device is the use of...     

The influence of discharge parameters on the generation of ions H<Subscript>3</Subscript><Superscript>+</Superscript> in the source based on reflective discharge with hollow cathode

For hydrogen ions source based on reflective discharge with hollow cathode the investigations of the effect of discharge current and gas pressure on the component composition of the ion beam have been performed. It has been shown that the optimization of the discharge parameters makes it possible to achieve up to 70% triatomic hydrogen ions H₃ ⁺ in the beam.     

Generation of Boron Ions for Beam and Plasma Technologies

Russian Physics Journal - The urgency of the study of generation of beams and plasmas containing boron ions is caused by their application in ion-beam and plasma technologies of modification of the...