Positron annihilation studies of defects in helium-irradiated silicon

Positron annihilation studies have been carried out on Si-n irradiated with He⁺ ions at the V.U.B. cyclotron, to a dose of 4×10¹⁷ He/cm². No temperature dependence on the S-parameter and lifetimes is seen below the irradiation temperature. The positron lifetime associated to the created defects is 290 ps. During the isochronal annealing, this lifetime stays constant up to 700 K. It is attributed to the annihilation of positrons from large vacancy-clusters filled with He atoms. From the isochronal annealing results, only one annealing stage is seen. This annealing stage which extends over a long range of temperature 700–1000 K, is ascribed to the degassing of helium atoms from defects and the growth of vacancy-clusters. The lifetime of positrons in those defects reaches a value of about 530±30 ps at 1000 K, indicating that the vacancy-clusters formed have a mean size of more than 8 vacancies.