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Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices 总被引:1,自引:0,他引:1
H. Hillmer J. Daleiden C. Prott F. Römer S. Irmer V. Rangelov A. Tarraf S. Schüler M. Strassner 《Applied physics. B, Lasers and optics》2002,75(1):3-13
Tailored scaling represents a principle of success that, both in nature and in technology, allows the effectiveness of physical
effects to be enhanced. Mutation and selection in nature are imitated in technology, e.g. by model calculation and design.
Proper scaling of dimensions in natural photonic crystals and our fabricated artificial 1D photonic crystals (DBRs, distributed
Bragg reflectors) enable efficient diffractive interaction in a specific spectral range. For our optical microsystems we illustrate
that tailored miniaturization may also increase the mechanical stability and the effectiveness of spectral tuning by thermal
and electrostatic actuation, since the relative significance of the fundamental physical forces involved considerably changes
with scaling. These basic physical principles are rigorously applied in micromachined 1.55-μm vertical-resonator-based devices.
We modeled, implemented and characterized 1.55-μm micromachined optical filters and vertical-cavity surface-emitting laser
devices capable of wide, monotonic and kink-free tuning by a single control parameter. Tuning is achieved by mechanical actuation
of one or several air-gaps that are part of the vertical resonator including two ultra-highly reflective DBR mirrors of strong
refractive index contrast: (i) Δn=2.17 for InP/air-gap DBRs (3.5 periods) using GaInAs sacrificial layers and (ii) Δn=0.5
for Si3N4/SiO2 DBRs (12 periods) with a polymer sacrificial layer to implement the air-cavity. In semiconductor multiple air-gap filters,
a continuous tuning of >8% of the absolute wavelength is obtained. Varying the reverse voltage (U=0–5 V) between the membranes
(electrostatic actuation), a tuning range of >110 nm was obtained for a large number of devices. The correlation of the wavelength
and the applied voltage is accurately reproducible without any hysteresis. In two filters, tuning of 127 and 130 nm was observed
for about ΔU=7 V. The extremely wide tuning range and the very small voltage required are record values to the best of our
knowledge. For thermally actuated dielectric filters based on polymer sacrificial layers, Δλ/ΔU=-7 nm/V is found.
Received: 10 May 2002 / Published online: 8 August 2002 相似文献
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J.G. Bauer R. Treichler T. Hillmer J. Müller G. Ebbinghaus 《Applied Surface Science》1991,50(1-4):138-142
Three depth profiling techniques have been combined to optimize the buried p-(Zn)-layer for the monolithic integration of a photodiode (PD) and a field-effect transistor (FET) for optoelectronic application. The Zn diffusion behaviour during MOVPE (metal organic vapour phase epitaxy) growth has been investigated. To meet the requirements of a shallow and a wide Zn profile simultaneously in one substrate a procedure including SiNx masking, selective reactive ion etching (RIE) and substrate etching has been developed. The depth profiling analyses proved to be valuable tools for process optimization. 相似文献
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T. F. Albrecht J. H. H. Sandmann J. Feldmann W. Stolz E. O. Göbel H. Hillmer R. Lösch W. Schlapp 《Applied physics. B, Lasers and optics》1995,60(5):459-467
Femtosecond pulses of a collinearly pumped Optical Parametric Oscillator (OPO) are applied for investigations of the carrier dynamics in ternary and quaternary semiconductor quantum wells. The design and the specifications of the OPO are given in detail. We show that no measurable jitter exists between the pump pulses and the output pulses of the OPO. Therefore, it is possible to use the OPO and its pump laser for two-color experiments with a time resolution limited by the pulse lengths. We present and discuss results of transient four-wave mixing experiments on (InGa) As/InP quantum wells, and find a new kind of polarization-dependent quantum beat phenomenon. In addition, non-degenerate experiments on quantum wells from the quaternary (InGaAl) As material system, using two pulses at different wavelengths (one from the OPO and one from the pump laser), are discussed as a novel experimental technique to study carrier trapping into quantum wells. 相似文献
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Paolo Bruni Carla Conti Elisabetta Giorgini Giorgio Tosi Henning Hopf Jorg Hillmer 《Monatshefte für Chemie / Chemical Monthly》1992,123(1-2):73-80
Summary Molecular complexes of mono and disubstituted [2.2]paracyclophanehydrazones with organic acceptors have been studied by means of thermodynamic and spectroscopic properties. Furthermore, the enhancement of the donor strength, induced by the hydrazono group, is viewed in the light of substituent as well as transannular effects.
Molekulare Assoziation von [2.2]Paracyclophanarylhydrazonen mit organischen Akzeptoren, 8. Mitt.
Zusammenfassung Es wurden Molekülkomplexe von mono- und disubstituierten [2.2]Paracyclophanarylhydrazonen mit organischen Akzeptoren mittels thermodynamischer und spektroskopischer Methoden untersucht. Zusätzlich wird der Anstieg in der Donorstärke, der von der Hydrazonogruppe induziert wird, im Hinblick auf Substituenten- und auch transannulare Effekte diskutiert.相似文献
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Carmona D Sáez J Granados H Pérez E Blair S Angulo A Figadere B 《Natural product research》2003,17(4):275-280
Dichloromethane extracts of both the roots and the leaves of Raimondia cf. monoica showed in vitro antiplasmodial and leishmanicidal activities against Plasmodium falciparum and Leishmania panamensis, respectively. Three 6-substituted 5,6-dihydro-2H-pyran-2-ones were isolated. (1) and (2) were identified as (6S)-(5'-oxohepten-1'E,3'E-dienyl)-5,6-dihydro-2H-pyran-2-one (1) and (6R)-(5'-oxohepten-1'Z,3'E-dienyl)-5,6-dihydro-2H-pyran-2-one (2), respectively. (-)-Arentilactone (3) was also isolated. The structure of the new compound (1) was determined by spectroscopic methods; additional spectroscopic data for (2) are reported for the first time. 相似文献