基于增益光纤长度优化的双波长运转掺铒光纤锁模激光器

构建了可自启动的双波长运转掺铒光纤锁模激光器.通过优化增益光纤长度,利用掺铒光纤在1530nm附近的再吸收效应调节激光器的增益谱,使激光器在1530nm和1560nm附近具有相同的增益强度.实验中采用31cm掺铒光纤作为增益光纤,以透射式半导体可饱和吸收体作为锁模器件,实现了自启动双波长锁模运转.激光器锁模输出重复频率为58.01MHz,信噪比为58.2dB,最高输出功率为4.8mW.锁模输出的光谱在1532.4nm和1552.3nm处具有两个强度接近的谱峰,谱峰间距约为20nm.该激光器无需手动调节即可实现双波长运转,更便于实际使用.     

滤波对8字腔掺铒光纤激光器锁模运转的影响

构建了基于损耗非对称非线性光学环镜的8字腔掺铒光纤锁模激光器,并讨论了腔内滤波带宽对腔内脉冲演化和激光器输出特性的影响.在非线性光学环镜中引入双向输出耦合器,耦合器和传输光纤位置的不对称产生非互易性,实现锁模运转.利用自制的可调谐滤波器实验研究了滤波带宽对激光器的影响.当滤波带宽为2.1 nm时,腔内脉冲的演化过程受滤波和孤子效应的共同作用,激光器顺时针和逆时针输出脉冲半高全宽分别为583.7fs和2.94 ps.随着滤波带宽增大,滤波的作用逐渐减弱,激光器两路输出脉冲参数逐渐接近,并接近傅里叶变换极限脉冲.当滤波带宽较大时,腔内脉冲的演化过程受增益谱和孤子效应的共同作用,激光器顺时针和逆时针输出脉冲均为变换极限脉冲,半高全宽约为440 fs.通过调节滤波器中心波长实现了对激光器输出脉冲光谱的连续调谐,调节范围大于30 nm.     

Suppression of multi-pulse formation in all-polarization-maintaining figure-9 erbium-doped fiber mode-locked laser

We report on a novel architecture to suppress the multi-pulse formation in an all-polarization-maintaining figure-9 erbium-doped fiber laser under high pump power. A 2×2 fiber coupler is introduced into the phase-biased nonlinear amplifying loop mirror to extract part of intracavity laser power as a laser output, and the dependence of output couple ratio of fiber coupler on the mode-locking state is experimentally investigated. The intracavity nonlinear effect is mitigated by lowering the intracavity laser power, which is conducive to avoiding the multi-pulse formation. In the meantime, the loss-imbalance induced by fiber coupler is helpful in improving the self-starting ability. With the proposed laser structure,the multiple pulse formation can be suppressed and high power single pulse train can be obtained. The laser emits three pulse trains which is convenient for some applications. Finally, the output power values of three ports are 5.3 m W, 51.3 m W,and 13.2 m W, respectively. The total single pulse output power is 69.8 m W, which is more than 10 times the result without OC2. The total slope efficiency is about 10.1%. The repetition rate of three pulse trains is 21.17 MHz, and the pulse widths are 2.8 ps, 2.63 ps, and 6.66 ps, respectively.     

硅片表面纳米颗粒剥离及其成分检测方法研究

硅片表面纳米级污染颗粒的检测与去除是集成电路制造(Integrated Circuit, IC)的关键环节.本文主要对纳秒级脉冲激光作用至硅片表面后纳米颗粒的动力学过程及颗粒成分在线检测方法进行了研究.搭建了双脉冲激光测量实验系统,并通过实验对300 nm Cu颗粒进行了双脉冲激光实验观测,通过分析表征颗粒运动轨迹的击穿光谱特征,从实验上观测到了清洗激光作用后颗粒沿垂直硅片表面向上的运动轨迹.在综合考虑空气碰撞阻力、颗粒重力的影响下,建立了激光清洗后颗粒的运动模型,并与实验相结合求解了运动模型参数,计算获得了清洗激光作用后颗粒的初始速度和激光作用时间内颗粒的平均加速度.本文为激光诱导晶圆表面纳米颗粒去吸附以及激光至纳米颗粒动力学过程研究提供了一种模型方法,也为集成电路污染源在线检测提供了一种重要方法.