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在不同实验条件下,用微波等离子体化学气相沉积设备在硬质合金(WC+6%Co)衬底上沉积了 具有不同结构特征的金刚石薄膜.用Raman谱表征薄膜的品质和应力,用压痕实验表征薄膜的 附着性能,考察了薄膜中sp2杂化碳含量、形核密度、薄膜厚度对薄膜附着性能 的影响.结 果表明:sp2杂化碳的缓冲作用使薄膜中sp2杂化碳的含量对薄膜中 残余应力有较大的影 响,从而使薄膜压痕开裂直径统计性地随sp2杂化碳含量的增加而减小;仅仅依 靠超声遗 留的金刚石晶籽提高形核密度并不能有效改变薄膜与硬质合金基体之间的化学结合状况,从 而不能有效提高薄膜在衬底上的附着性能;在薄膜较薄时,晶粒之间没有压应力的存在,开 裂直径并不明显随厚度增加而增加,只有当薄膜厚度增加到一定值,晶粒之间才有较强压应 力存在,开裂直径随厚度的增加而较为迅速地增加.
关键词:
金刚石薄膜
附着性能
2杂化碳')" href="#">sp2杂化碳
成核密度
薄膜厚度 相似文献
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Tight—binding calculation of the electronic states of bulk—terminated GaAs(311)A and B surfaces
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We have carried out theoretical investigations on the electronic structure of GaAs(311)A and GaAs(311)B surfaces. The bulk electronic structure of GaAs has been described by the second-neighbour tight-binding formalism and the surface electronic structure was evaluated via an analytic Green function method. First, we present the surface band structure together with the projected bulk band of both Ga-terminated and As-terminated for GaAs(311)A and GaAs(311)B surfaces, respectively. In each case, the number of surface states is determined, and the localized surface features and orbital properties of these surface states along Γ-Y-S-X-Γ high symmetry lines of the surface Brillouin zone are discussed. For the Ga-terminated GaAs(311)A (1×1) surface, we have tested two possible structure models, i.e. "the bridge site" and "the hollow site" models. In comparison with the angle-resolved photoelectron spectroscopy studied recently, the results have shown that the surface electronic states of the hollow site model are in good agreement with the experiments, whereas those of the bridge site model are not. So we have concluded that the hollow site model is favourable for the Ga-terminated GaAs(311) (1×1) surface and the bridge site model should be excluded. 相似文献
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Uniform films of aligned carbon nanotubes were grown on a patterned Ni coated ceramic substrate by microwaveplasma chemical vapour deposition (MWPCVD). A laser writing technique was used to make some patterns onthe substrate. The controlled selective growth of nanotubes on the patterned substrate can be obtained directlyduring the reaction process in the MWPCVD chamber. The Raman spectrum shows a good graphitization of thecarbon nanotubes. In the field emission test, turn-on field of 1 V/μm and emission current density of 5 mA/cm^2 at 3.3 V/μm were achieved. 相似文献
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阐述了模板的动力学控制作用对大尺度有序结构特别是亚稳相的生长,对自由能相差很小的异构体的选择生长所具有的重要作用.汲取现有金刚石生长理论的合理思想,以模板概念为基础给出了对化学气相沉积(CVD)过程的动力学热力学综合描述:1)碳原子在碳氢化合物中的化学势高于固相碳,气相碳氢化合物的碳原子有可能落到化学势较低的固态碳的各种异构体.2)气相碳通过表面反应实现向固相碳的转化.3)表面的模板作用是控制气相碳原子转换方式的主要动力学因素,不同的表面(石墨各种取向的表面及金刚石不同取向的表面)选择了落入其上的碳原子的结构方式及能量状态.4)因此,衬底的不同区域可发生几种不同的独立的表面反应过程,这些反应对应于不同表面的生长.5)而这些表面反应的方向性及速度受表面临域热力学因素的影响,反应的方向性决定了某种晶面是生长或刻蚀,在特定的温度、压强及各种气体分压下可以实现金刚石的生长和石墨的刻蚀.6)衬底局域晶格结构及键价结构和衬底表面气相的温度、压强及各种气体分压等热力学条件共同决定了成核的临界条件.7)与外界有能量和物质交换的等离子体系统,以及气相中发生的一系列化学反应,仅起到了维持某种固相表面生长所需要的非平衡热力学条件和化学条件的作用.金刚石和石墨表面具有的模板动力学控制作用,在特定热力学条件下主导自身外延层的生长方式;异质衬底的某些局域微观结构可以作为新相生长成核的局域模板;不同材料、不同的处理方法、及不同的化学环境下的衬底具有不同的局域微观结构,从而决定了多晶薄膜的取向优势.
关键词:
模板
异构体
选择性生长
金刚石薄膜 相似文献