Dielectric Properties of Multilayered Ba0.5Sr0.5TiO3 Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering

A new stacking method via variation ofsubstrate temperature in rfmagnetron sputter is used to fabricate polycrystalline/polycrystalline Ba0.5Sr0.5TiO3 thin films with higher dielectric constant, higher breakdown strength and lower leakage current densities than those prepared by a conventionM deposition method. The improved figure of merit G （ε0εrEb） of the Ba0.5Sr0.5TiO3 thin films implies that they are a feasible insulation layer for thin film electroluminescent devices.     

小型掠入射式近边X射线吸收谱仪的设计

近边X射线吸收精细结构(NEXAFS)谱包含了吸收原子的局域结构信息,由于其适用范围广,灵敏度高,已经成为研究物质结构的重要手段之一。为了研究有机物的碳1s NEXAFS谱,本文基于气体激光等离子体X射线光源,采用具有平场特性的凹面变线距光栅作为分光元件,面阵CCD作为光谱探测器,设计了一台小型掠入射式近边X射线吸收谱仪。通过优化光栅和CCD的装配方案,得到了入射角88.6°的装配参数。利用光线追迹法分析了谱仪的分辨率,该谱仪工作波段2~5 nm,在4.4 nm处分辨率可达666。通过分析各结构参量误差对谱线半高宽的影响发现,半高宽对入射角的误差最为敏感,优化的装配方案可以实现入射角的高精度调节。利用氮气等离子体光谱测试了光谱仪的性能,结果显示分辨率达到设计指标。