Junction barrier Schottky rectifier with an improved P-well region

<正>A junction barrier Schottky（JBS） rectifier with an improved P-well on 4H-SiC is proposed to improve the V_F-I_R trade-off and the breakdown voltage.The reverse current density of the proposed JBS rectifier at 300 K and 800 V is about 3.3×10^-8 times that of the common JBS rectifier at no expense of the forward voltage drop.This is because the depletion layer thickness in the P-well region at the same reverse voltage is larger than in the P⁺ grid,resulting in a lower spreading current and tunneling current.As a result,the breakdown voltage of the proposed JBS rectifier is over 1.6 kV,that is about 0.8 times more than that of the common JBS rectifier due to the uniform electric field.Although the series resistance of the proposed JBS rectifier is a little larger than that of the common JBS rectifier,the figure of merit（FOM） of the proposed JBS rectifier is about 2.9 times that of the common JBS rectifier.Based on simulating the values of susceptibility of the two JBS rectifiers to electrostatic discharge（ESD） in the human body model（HBM） circuits,the failure energy of the proposed JBS rectifier increases 17%compared with that of the common JBS rectifier.