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Superconducting coplanar waveguide(CPW) can be widely used as two-dimensional(2 D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated airbridges are approximately 3 m high and up to 120 m long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound. 相似文献
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