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The design of a two-dimensional(2D) microscanner actuated electrostatically is presented,and a silicon-oninsulator(SOI) micromachining process is utilized to fabricate the sample.The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes,generating maximum twisting angles of ±10 and ±5.3 under two 10-V square waves,respectively.A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner,revealing an image resolution of 168×56 at 20 frames per second. 相似文献
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