ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

The Ge_xSi_1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant along <100> zone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along the <100> zone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy along <100> zone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed along <100> zone axis.     

纳米硅薄膜的生长动力学与计算机模拟

氢化纳米硅(nc-Si:H)薄膜由于其具有奇异的结构和独特的性质,而引起广泛的关注.本文在等离子体增强化学气相淀积(PECVD)系统中,以高纯H₂高度稀释SiH₄为反应气体源,在射频和直流双重功率源的激励下制备成功具有纳米结构的nc-Si:H薄膜.利用高分辨率电子显微镜(HREM)、Raman散射谱(RSS)、扫描隧道电子显微镜(STM)等实验技术对nc-Si:H薄膜样品作了研究.基于对薄膜制备过程的动力学分析,提出nc-Si:H薄膜的分形生长模型:扩散与反应限 关键词：     

ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

The Ge_xSi_1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant along <100> zone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along the <100> zone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy along <100> zone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed along <100> zone axis.