高温超导滤波器频带偏移研究——以L波段滤波器为例

基于阶跃阻抗谐振器(SIR)设计了一款工作于L波段的十四阶高温超导带通滤波器,借助交叉耦合结构在通带两侧引入两对传输零点以提高带边陡度,使得滤波器的60 dB/3 dB矩形度优于1.25。滤波器制备在双面涂覆YBCO薄膜、厚度为0.500 mm的MgO基片上。70 K温度下的测试结果表明：其带外抑制优于80 dB,插入损耗优于0.31 dB,反射损耗优于14.8 dB,通带范围为1.235～1.271 GHz。与设计指标1.250～1.286 GHz相比,通带范围往低频端整体偏移15 MHz。梳理滤波器的研制流程,经分析后认为频带偏移主要源于光刻、刻蚀中线条变窄效应和超导薄膜在超导状态下的动态电感效应。     

Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices

This paper presents high quality YBa₂Cu₃O_7-δ(YBCO) thin films on LaAlO₃ substrate for microwave devices prepared by pulsed laser deposition(PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance(Rs).This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To ev...