High-Temperature Superconducting YBa2Cu3O7-δ Josephson Junction Fabricated with a Focused Helium Ion Beam

As a newly developed method for fabricating Josephson junctions, a focused helium ion beam has the advantage of producing reliable and reproducible junctions. We fabricated Josephson junctions with a focused helium ion beam on our 50 nm YBa₂Cu₃O_7-δ（YBCO） thin films. We focused on the junction with irradiation doses ranging from 100 to 300 ions/nm and demonstrated that the junction barrier can be modulated by the ion dose and that within this dose range, the junct...